Vacuum Module: Series ZX

Transcripción

Vacuum Module: Series ZX
Vacuum Ejector System/External Vacuum Supply System
ZX
ZR
ZM
ZY
Suitable for handling electronic components and precision components up to 100g
ZH
Modular Design
ZU
Customized application function through selection of module components.
ZL
ZF
ZP
INDEX
ZCU
Characteristics/Application examples ···························· P.3.1-2
Common specifications ················································· P.3.1-3
CYV
Vacuum
related
Ejector System
How to Order ································································· P.3.1-4
Combination of supply valve and release valve ············· P.3.1-6
Construction ···································································· P.3.1-7
Ejector unit ······································································ P.3.1-8
Valve unit ········································································ P.3.1-10
Suction filter unit ····························································· P.3.1-12
Vacuum pressure switch unit ········································· P.3.1-13
Dimensions/Without valve unit ······································· P.3.1-17
Dimensions/Combination of supply valve and release valve
K1, K3, K6, K8, J1 and J2 types ················· P.3.1-18 to 3.1-29
Manifold ·········································································· P.3.1-30
Dimensions ···················································· P.3.1-32 to 3.1-37
External Vacuum Supply System
How to Order··································································· P.3.1-38
Combination of supply valve and release valve ············· P.3.1-40
Construction ·································································· P.3.1-41
Valve unit ······································································· P.3.1-42
Suction filter unit/Vacuum pressure switch unit ···············P.3.1-43
Combination of supply valve and release valve/Dimensions
K1, K3, K6 and K8 types ··························· P.3.1-42 to 3.1-51
Manifold ·········································································· P.3.1-52
Dimensions ····················································· P.3.1-54 to 3.1-59
Unit Components
Ejector system: Single/Manifold ····································· P.3.1-60
Vacuum pump system: Single/Manifold ························· P.3.1-62
Made to Order
qOther combinations of supply valve and release valve ··· P.3.1-64
3.1-1
Vacuum Module
Vacuum Ejector System/External Vacuum Supply System
Series ZX
For electronic components and precision components up to 100g
Modular Design
Customized application function through selection of module components.
Compact size and light weight (120g with complete unit); well suitable for actuator mounting
Ejector nozzle size: ø5 to ø10 (Suction flow: 5 to 22 l/min
Ejector unit
Filter
Filter unit
Filter
Vacuum
switch unit
Valve
unit
Valve
unit
Single Unit
Filter
unit
Single
Unit
Vacuum
switch unit
Filter
Vacuum
switch unit
Ejector unit
Valve
unit
Complete unit
Valve
unit
Ejector unit
Valve
unit
Filter
unit
Ejector unit
Valve
unit
Filter
Ejector System
Ejector unit
Vacuum
switch unit
Filter
unit
Ejector unit
Ejector System
Complete unit
Applications Examples
Chip bonding
3.1-2
Chip mounting
Pick and place
miniature components
Escorting printing paper
Vacuum Module
Series
ZX
Modular Components Introduction
Standard Specifications
Components
Ejector unit
Series ZX1
Characteristics
Nozzle dia. ø(mm)
Ejector System
P.3.1-4 to 3.1-39
P.3.1-40 to 3.1-65
0.5
0.7
1.0
Max. suction flow (l/min)
5
10
22
Air consumption (l/min)
13
23
46
Max. vacuum pressure
Exhaust release
Valve unit
ZX1-V
ZR
Built-in silencer/Manifold exhaust
Individual exhaust port: RC(PT)1 8
Components
ZM
ZY
Supply valve/Release valve
Function
Normally closed/Normally open
ZH
Operation
Solenoid valve/Air operated valve
ZU
Supply voltage
Vacuum
switch unit
Series ZS
ZX
–84kPa
Type
Pressure setting range
24, 12, 6, 5, 3V DC
Vacuum switch
Adsorption confirmation switch
Vacuum switch
0 to –101kPa
–20kPa to –101kPa
0 to –101kPa
–20kPa to –101kPa
Hysteresis
Applicable pad dia. (mm)
ZL
3% or less
ø2 to ø25
Supply voltage
ZP
4mmHg
ø0.3 to ø1.2
ø2 to ø25
24VDC
ø0.3 to ø1.2
24VDC
ZCU
CYV
Vacuum
related
Suction filter
unit
ZX1-F
Operating pressure range
Vacuum to 0.5MPa
30 µm
Common
specificatons
Manifold
Unit
Filtration
Air supply port size
M5 (Standard)/M6 (Option)
Vacuum pad connection port
M5 (Standard)/M6 (Option)
Air supply port
Rc (PT)1 8
Exhaust port
Rc (PT)1 8
External pilot port
M5
Number of stations
Max.8 stations
Refer to p.3.1-8 to 3.1-18 for more detailed
specifications for each unit.
Refer to p.3.1-4 and 3.1-5 for ejector system
unit.
Refer to p.3.1-30 for ejector system manifold.
Refer to p.3.1-38 and 3.1-41 for external
vacuum supply system unit.
Ordeer
Mad
ZF
P.3.1-66 to 3.1-70
Single
unit
Manifold
Single
unit
Manifold
Refer to p.3.1-52 for external vacuum supply system manifold.
Refer to p.3.1-62 to 3.1-65 for units for replacement.
3.1-3
Vacuum Module
Series ZX/Ejector System
C
su om
pp bi
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an tio
d no
re f
le va
as c
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va m
lv
es
How to Order
Components
Ejector
unit
Valve unit
N.C. style
Vacuum
switch unit
ZX1 10 1
K1
5 L Z
E C
Q
Ejector
unit
Valve unit
N.O. style
Vacuum
switch unit
ZX1 10 1
K3
5 L Z
E C
Q
Ejector
unit
Vacuum
switch unit
ZX1 10 1
E C
Q
Ejector
unit
Filter
unit
ZX1 10 1
F
Q
PV/V port size
__
M5
Ejector unit nozzle dia.
05
07
10
0.5mm
0.7mm
1.0mm
Ejector exhaust
1
2
3
With silencer
Port exhaust Rc(PT)1/8
Common exhaust (Manifold only)
Y
Vacuum switch electrical entry
__
Lead wire length: 0.6m
Grommet
Lead wire length: 3m
L
C
CL Connector Lead wire length: 3m
Without connector
CN
(without lead wire)
Valve unit/Combination of supply valve and release valve.
Refer to Table 1 on p.3.1-7.
Pilot valve
__
Y∗
DC: 1W
(With light: 1.05W)
DC: 0.45W
(With light: 0.5W)
•Refer to Table 3 on p.3.1-5
for part number of lead
wire with connector.
∗24V DC and 12V DC are
applicable to 0.45W.
Vacuum switch unit/Filter unit
E Vacuum pressure switch (General type) With suction filter
Suction filter only
F
Voltage
Caution
Surge voltage suppressor
5
6
V
S
R
__
M6
24V DC
12V DC
6V DC
5V DC
3V DC
Air-operated
(K6, K8, J3, J4, D3, D4)
Vacuum digital pressure switch unit
21 2 outputs/Without analogue output
D mmHg
22 2 outputs/With analogue output
23 1 output (With trouble detection )/Without analogue
kPa
DP
24 1 output (With trouble detection)/With analogue
Note) Analogue output is available only for
grommet style.
Indicator light and surge voltage suppressor
DC style:
Match the polarity of the connectors
according to the and marks on the
connectors. Do not interchange the
polarities to prevent the diodes or the
switching elements from becoming burned.
If lead wires are pre-connected, the red wire
is and the black wire is .
L
LN
Plug
LO
connector
M
MN
MO
G
Grommet
H
__
Electrical entry
W/o lead wire
Without connector
W/o lead wire
Without connector
Air operated
Note) In case of "K1" or "J1" (combination
of supply and release valves), M type
plug connector can not be used.
• Refer to Table 2 on p.3.1-5 for part
number of lead wire with connector.
• Refer to p.3.1-32 for ordering the manifold.
• Refer to p.3.1-62 and 3.1-63 for ordering
a unit for replacement.
3.1-4
Manual override
__
Non-locking push style
Locking slotted style (Tool)
B
__
None
Z
S
With indicator light and
surge voltage suppressor
With surge voltage suppressor
Ejector System
Series
ZX
Valve Unit/Combination of Supply Valve and Release Valve
Components
Supply valve
Release valve
Solenoid
(N.C.)
Solenoid
(N.O.)
Air operated
(N.C.)
Air operated
(N.O.)
Solenoid
(N.C.)
Solenoid
(N.O.)
Solenoid
(N.C.)
Solenoid
(N.C.)
Symbol
Supply valve
Air operated
Solenoid valve
N.C.
N.O.
N.C.
N.O.
None
(VJ114) (VJ324) (ZX1A) (VJA324)
K1
–
Solenoid valve
N.C.
N.C.
(VJ114) (VJ314)
Release valve
Air operated External release
N.C.
None
ZX1A
(VJA314)
–
–
–
–
–
–
–
–
–
–
–
–
–
–
–
–
–
–
–
–
–
ZR
ZM
K3
–
External release
K6
–
–
Air operated
(N.C.)
K8
–
–
–
None
J1
–
–
–
–
–
–
–
–
ZU
None
J2
–
–
–
–
–
–
–
ZL
–
–
–
–
–
–
–
wHow to Order Valve Plug Connector Ass'y
Connector ass'y part No.
(DC)
Lead wire length
VJ10 20 4A 6
–
6
10
15
20
25
30
ZY
ZH
Without valve unit
ZF
∗ Air operated valve: Controlled by external 3 port valve. Weight (g) / K1:82, K3:132, K6:58, K8:132, J1:77, J2:100
∗ External release: Directly released by external 2 port valve.
0.3m (standard)
0.6m
1m
1.5m
2m
2.5m
3m
How to order
If ordering a vacuum module
equipped with valves with 600mm
or the longer lead wire,
specify both the vacuum module
valve and the connector ass'y part
numbers.
(Ordering example)
ZX1051-K15LOZ-EC............ 1 pc.
∗ VJ10-20-4A-6.....................2 pcs.
eVacuum Switch Plug Connector Ass'y
ZS 10 5A
Note) If ordering a vacuum
switch with 5m lead wire,
specify both the vacuum unit
switch and the 5m lead
wire connector part numbers.
(Ordering example)
ZX1051-K15LO- ECN.........1 pc.
VJ10-20-4A-6..................... 2 pcs.
ZS-10-5A-50....................... 1 pc.
Model
Ejector
exhaust
ZX1051-K15LZ-EC-Q
ø0.5
ZX1051-K35MZ-EC-Q
ZX1071-K15LZ-EC-Q
ø0.7
ZX1071-K35MZ-EC-Q
ZX1101-K15LZ-EC-Q
ø1.0
ZX1101-K35MZ-EC-Q
With
silencer
–
30
50
0.6m
3m
5m
Combination
Indicator light and
Electrical
Solenoid valve Electrical entry
Vacuum switch
surge voltage
entry
Supply valve Release valve
rated voltage (lead wire)
unit
suppressor
(vacuum switch)
(Pilot valve) (Direct operated)
N.C.
N.C.
(VJ114)
(VJ114)
N.C.
N.O.
(VJ314)
(VJ324)
With
N.C.
N.C.
indicator
General
Plug
(VJ114)
(VJ114)
Connector
light
vacuum
24VDC connector
style
and
switch
N.C.
N.O.
style
surge voltage
(ZSE)
(VJ314)
(VJ324)
suppressor
N.C.
N.C.
(VJ114)
(VJ114)
N.C.
N.O.
(VJ314)
(VJ324)
ZX1-K15LZ-E-Q
ZP
ZCU
Lead wire
length
Ejector System/Recommended Model (The models below will have shorter deliveries)
Nozzle size
(mm)
ZX
ZX1-K35MZ-E-Q
3.1-5
CYV
Vacuum
related
Series
ZX
Ejector System/Combination of supply valve and release valve
Combination symbol: K8
An N.C. solenoid valve is used for the
supply valve. Also, an N.C. solenoid
valve is used for the vacuum release
valve.
An air operated N.O. valve is used as
the supply valve. An air operated N.C.
valve.
Application: This combination is used
for effecting control in accordance with
electric signals.
electric signals. Because the supply
valve is N.O., the pressure that is
supplied to the ejector is not interrupted
during a power outage; as a result, the
state of suction can be maintained. This
combination is used for preventing the
workpieces from dropping during power
outages.
How to operate
Valve
Condition
1. Adsorption of work
2. Vacuum release
3. Operation stop
How to operate
Supply valve (N.C.)
Solenoid valve
ON
OFF
OFF
Combination symbol:
Release valve (N.C.)
Solenoid valve
OFF
ON
OFF
K3
Valve
Condition
2. Vacuum release
3. Operation stop
Supply valve (N.O.)
Air operated valve
OFF
ON
ON
Combination symbol:
An N.O. solenoid valve is used for the
supply valve. Also, an N.C. solenoid
valve.
Valve
Condition
2. Vacuum release
3. Operation stop
Application: This combination is
used for effecting control in
accordance with electric signals. A
vacuum release is effected by the
intrusion of air between the silencer,
pad, and the workpiece. This
combination is used when there is no
need to accelerate the vacuum
release speed.
How to operate
Supply valve (N.O.)
Solenoid valve
OFF
ON
ON
Combination symbol:
Solenoid valve
OFF
ON
OFF
K6
Valve
Condition
2. Vacuum release
3. Operation stop
How to operate
Condition
2. Vacuum release
3. Operation stop
3.1-6
How to operate
Release valve
External 2 port valve
OFF
ON
OFF
Release valve (N.O.)
None
J2
An N.O. solenoid valve is used for the
supply valve. A vacuum release valve is
not used.
electric signals.
Supply valve
ON
OFF
OFF
Supply valve (N.C.)
Solenoid valve
ON
OFF
OFF
Combination symbol:
An external 3 port valve must be
provided to serve as the supply valve.
Also, an external 2 port valve (vacuum
valve) must be provided to serve as the
vacuum release valve.
Valve
J1
An N.C. solenoid valve is used for
the supply valve. A vacuum release
valve is not used.
supplied to the ejector is not
interrupted during a power outage; as
a result, the state of suction can be
maintained. This combination is used
for preventing the workpieces from
dropping during power outages.
How to operate
Air operated valve
OFF
ON
OFF
Valve
Condition
2. Vacuum release
3. Operation stop
supplied to the ejector is not interrupted
outages. A vacuum release is effected by
the intrusion of air between the silencer,
pad, and the workpiece. This type is used
when there is no need to accelerate the
vacuum release speed.
Supply valve (N.O.)
Solenoid valve
OFF
ON
OFF
Release valve
None
Ejector System
Series
ZX
Ejector System/Construction
ZX
ZR
ZM
ZY
ZH
Replacement Parts
Component Parts
No.
q
w
e
r
t
y
u
i
Description
Material
Note
Poppet valve ass'y
—
ZX1-PV-O
Release flow adjusting needle Stainless steel
Aluminum
Manifold
—
ZSE2, ZSP1
Vacuum switch
—
ZX1-VA-D-
Valve unit
—
(PV PS PD)
Interface plate
Silencer case
Polycarbonate (1)
Filter case
No.
o
!0
!1
Material
Filter element
Ejector assembly
PVF
—
q
w
e
r
Model
Combination
ZX1-VJ114-
K1, J1
ZX1-VJ3 1
2 4-
K3, J2
ZX1-VJA3 1 4
2
ZX1A-
K8
Table2: How to order solenoid valve
ZX1
ZX1
1
2
VJ114
5 L Z
-Q
VJ3 2 4
5 L Z
-Q
Type of actuation
N.C. (Normally closed)
N.O. (Normally open)
Body option
— Individual exhaust for pilot valve
M Common exhaust
Voltage
for main and pilot valves
24V DC
5
Note) In case of N.C.,
12V DC
6
indicate no symbol.
V
6V DC
(Individual exhaust
5V DC
S
for pilot valve).
3V DC
R
Pilot valve
—
DC: 1W
(With light: 1.05W)
Y∗
DC: 0.45W
(With light: 0.5W)
∗24V DC and 12V DC are applicable to
0.45W type.
Note) Screw length of VJ100 and VJ300
for series ZX is different from that of the
standard model.
〈Screw length〉 VJ100: M1.7 X 15
VJ300: M1.7 X 22
—
B
—
S
Z
—
ZL
ZF
ZP
ZCU
Table 3: How to order air operated valve CYV
Component
Supply valve
Release valve
Solenoid valve
Solenoid valve
N.C. (VJ114)
N.C. (VJ114)
Solenoid valve
Solenoid valve
N.C. (VJ314)
N.O. (VJ324)
Air operated
Air operated
N.O. (VJA324)
N.C. (VJA314)
Air operated N.C. (ZX1A)
Part No.
Refer to Table
1, 2, and 3
ZX1-FE
Refer to Table 4
Note 1) • The case is made of polycarbonate. Therefore, do not use with or expose it to
the following chemicals: paint thinner, carbon tetrachloride, chloroform, acetic
ester, aniline, cyclohexane, trichloroethylene, sulfuric acid, lactic acid,
watersoluble cutting oil (alkalinic), etc.
• Do not expose it to direct sunlight.
Table1: How to order pilot valve
No.
ZU
Description
Pilot valve
(Air operated)
Manual override
Locking slotted style
None
With indicator light and surge voltage suppressor
Port size
M3
M5
Note) In case of "ZX1-VJ114",
M, MN and MO cannot be used.
M3
M5
Pilot port/External
release port
Table 4: How to order ejector assembly
K6
ZX1 W D 05 1
Assembly No.
Ejector unit nozzle dia.
05
0.5mm
07
0.7mm
10
1.0mm
Ejector style
(Exhaust style)
With silencer
1
Port exhaust
2
Common
3
exhaust
∗An adapter should be attached to the assembly to be
used as a unit. PV port and V port can be connected.
Ejector
Ass'y
Electrical entry
L
Connector (0.3m)
LN
Connector (without lead wire)
Without connector
LO
Connector (0.3m)
M
MN
Connector (without lead wire)
Without connector
MO
Grommet (0.3m)
G
H
Grommet (0.6m)
Vacuum
related
ZX1A M3
• Combination/ ZX-WD
• Used as a unit by attaching an adapter/ ZX-W-
Caution
Turning the vacuum release flow volume adjustment
needle clockwise reduces the vacuum release flow
volume; the needle valve is fully closed when the needle
stops turning. Turning the needle 2 full turns
counterclockwise from the fully closed position renders
the needle valve fully open. The needle will fall out if it is
turned more than 4 full turns.
3.1-7
Series
ZX
Ejector Unit
Specifications
ZX1-W05 12
0.5
5
13
ZX1-W07 12
ZX1-W10 12
1.0
0.7
22
10
46
23
–84kPa
0.7MPa
0.2MPa to 0.55MPa
0.45MPa
5 to 50 °C
Code q Built-in silencer·················For single and manifold
Ejector exhaust style∗
Code w Individual exhaust·············For single and manifold
Built-in silencer: 35g/Individual exhaust: 45g
Weight
Standard accessory
Bracket B
∗Codes q and w are corresponding to the suffixes in "How to Order" to indicate the exhaust method.
Unit No.
Nozzle dia. ø(mm)
Max. suction flow (l/min)
Air consumption (l/min)
Max. vacuum pressure
Max. operating pressure
Supply pressure range
Standard supply pressure
Operating temperature range
How to Order
ZX1
W 05 1
Nozzle size
0.5mm
05
0.7mm
07
1.0mm
10
—
Y
1
2
PV/V port size
M5
M6 (Option)
Ejector exhaust
Built-in silencer
Individual exhaust Rc(PT)1/8
Dimensions/ZX1-W12
17
M5 (or M6)
(P port)
Air pressure supply port
D
5.4∗
6
8
18
17.5
50
(55.4)∗
M5 (or M6)
(PD port)
External release
port plug (1)
2-ø3
(Mounting hole)
10
1∗
3
M5
(or M6)
Vacuum pad
connection port
48.2∗
47∗
11.5∗
Symbol
27
20∗
PD
P
V
8∗
Bracket B
(Standard accessory)
Note1) Remove the plug at external release.
3.1-8
2-ø3.6
(Mounting hole)
Note2) Dimensions ∗: For mounting bracket B.
Air supply
Ejector System
Flow Characteristics/Exhaust Characteristics
ZX
[At 0.45Mpa]
How to Read Graphs
ZX1-W05
Exhaust
Series
Flow
ZX
ZR
ZM
ZY
ZH
ZU
ZX1-W07
Exhaust
Flow
( ): mmHG.
Flow characteristics are expressed in ejector
vacuum pressure and suction flow. If suction
flow rate changes a change in vacuum pressure
will also be expressed. Normally this relationship
is expressed in ejector standard use. In graph,
Pmax is max. vacuum pressure and Qmax is
max. suction flow. The valves are specified
according to catalogue use. Changes in vacuum
pressure are expressed in the below order.
qWhen ejector suction port is covered and
made airtight, suction flow becomes 0 and
vacuum pressure is at maximum value (Pmax).
wWhen suction port is opened gradually, air
can flow through, (air leakage), suction flow
increases, but vacuum pressure decreases.
(condition P1 and Q1)
eWhen suction port is opened further, suction
flow moves to maximum value (Qmax), but
vacuum pressure is near 0. (atmospheric
pressure).
When vaccum port (vacuum piping) has no
leakage, vacuum pressure becomes maximum,
and vacuum pressure decreases as leakage
increases. When leakage value is the same as
max. suction flow, vacuum pressure is near 0. In
the case when ventirative or leaky work should
be adsorbed, please note that vacuum pressure
will not be high.
ZX1-W10
Exhaust
Flow
Precautions
Be sure to read before
handling. Refer to p.0-20 and
0-21 for Safety Instructions
and common precautions on
the products mentioned in
this catalogue.
Caution
Refer to P.3.0-7 for the product selection in
series ZX and the sizing program.
( ): mmHG.
3.1-9
ZL
ZF
ZP
ZCU
CYV
Vacuum
related
Series
ZX
Valve Unit/ZX1-VA
Specifications
Unit No.
Components
ZX1-VA
Vacuum supply valve
Vacuum release valve
Pilot operated
Air operated
Direct operated
Solenoid valve
Solenoid valve External Air operated
Operation
N.C.
N.C.
N.O.
N.C.
N.O.
N.C. release
N.C.
(VJA314) (VJ114) (VJA324) (ZX1A) (VJA324) (VJ114) (ZX1A) (VJ314)
0.07
0.45
Effective area mm2
3(163,3) Main valve
Ҁ
(3.8)
(24.5)
Flow Q (Nl/min)
0.3 to 0.6MPa
Max. operating frequency
5Hz
5 to 50°C
Interface plate symbol
PV↔PS↔PD
Standard accessory
Bracket C
Solenoid valve/Specifications
VJ114
VJ314, VJ324
Rated Voltage
24, 12, 6, 5, 3V DC (50/60Hz)
L plug connector, grommet L plug connector, M plug connector, grommet
Electrical entry
Indicator light/surge voltage suppressor
With or Without
Non-locking push style/Locking slotted style
Manual override
∗ Applicable to plug connector; connector ass'y with rectifier is attached.
Solenoid valve/Model
Model
Solenoid valve
N.C.(VJ114)
Release valve
Solenoid valve
N.C.(VJ114)
Solenoid valve
N.C.(VJ314)
External release
(ZX1A)
Air operated
N.C.(VJA314)
—
K1 [82]
—
K5 [73]
—
K3 [132]
—
K2 [73]
—
None
Supply valve
Solenoid valve
Air operated
N.O.(VJ324)
N.C.(ZX1A)
K6 [58]
—
K4 [119]
J2 [100]
J1 [77]
J3 [41]
[ ]: Weight (g)
How to Order/Refer to p.3.1-4 for details.
ZX1
V A K1
System
A: Ejector system
B: External vacuum supply system
Combination of supply
valve and release valve
Pilot valve
Rated voltage
3.1-10
-Q
5 L Z
PV/V port size
Manual
override
Indicator light and surge
voltage suppressor
Electrical entry
None
D1 [77]
D2 [100]
D3 [41]
D2 [100]
—
Ejector System
Series
ZX
Connector Assembly for 100V AC
Connector assembly with rectifier attached.
ZX
Connector assembly with rectifier part no.
VJ10
36
ZR
A
Rated voltage
Voltage
Symbol
Lead wire color
1
100V AC 50/60Hz Blue (2 pcs.)
110V AC 50/60Hz
3
Grey (2 pcs.)
(115V AC 60Hz)
Valve Unit
Normally Closed
Lead wire length
Symbol
L mm
—
300
6
600
10
1000
1500
15
2000
20
2500
25
3000
30
ZM
ZY
se
ea
um
cu
Va por t
D
rel
ZH
ZU
se
ea
t
ot
Pil aus
t
h
ex por
PE
el
ly r
pp
su
Air or t
p
A
ZL
ZF
ply
up t
s
r
Ai por
PV
ZP
ZCU
CYV
Vacuum
related
Normally Open
Note) Dimensions ∗: For mounting bracket C
∗∗: For mounting interface
3.1-11
Series
ZX
Suction Filter Unit/ZX1-F
Specifications
Unit no.
Filteration efficiency
Element
Weight
ZX1-F
Vacuum to 0.5MPa
5 to 50°C
30µm
PVF
35g
Note) If not operated within the specified range of pressure and temperature, trouble may result.
Filter
Symbol
Note) Dimensions ∗: For bracket A mounting
Filter Case
Caution
qThe case is made of polycarbonate. Therefore,
do not use it with or expose it to the following
chemicals: paint thinner, carbon tetrachloride,
chloroform, acetic ester, aniline, cyclohexane,
trichloroethylene, sulfuric acid, lactic acid, watersoluble cutting oil (alkalinic), etc.
wDo not expose it to direct sunlight.
3.1-12
Vacuum Pressure Switch Unit
Series
ZX
Vacuum Pressure Switch Unit/ZSE2-0X
High-speed response/10ms
Compact size: 39H X 20W X 15D
Vacuum Pressure Switch
Specifications
Unit no.
Fluid
Setting pressure range
Hysteresis
(except the connecting portion)
Improved wiring: connector style
uses a carrier diffusion
semiconductor pressure sensor
Accuracy
Voltage
Port size
Pressure detector
(A carrier diffusion semiconductor
pressure sensor is used.)
ZSE2-0X
Air
0 to -101kPa
3% Full span or less
±3% Full span (5 to 40°C)
12 to 24V DC (Ripple ±10% or less)
M5
•Weight — 50g •Output — Open collector 30V/80mA •Indicator light — Light at ON state •Current
consumption — 17mA or less (24V DC, at ON state)
•Operating temperature range — 0 to 60°C •Max. operating pressure — 0.2MPa
∗When using ejector system, instantaneous pressure up to 0.5MPa will not damage the switch.
Note) If not operated within the specified range of pressure of temperature, trouble may be result.
ZX
ZR
ZM
ZY
ZH
Wiring
ZSE2 connection
ZU
Connection with PLC
At negative COM terminal
∗
ZL
∗
ZF
ZP
∗ Switch main circuit
ZCU
CYV
How to Order
ZSE2
Vacuum
related
0X
-Q
15
PV/V port size
—
M5
Y
M6 (optional)
Electrical entry
—
Grommet (0.6m)
L
Grommet (3m)
C
Connector (0.6m)
CL
Connector (3m)
CN
Without connector
•Filter case
How to Set Vacuum Pressure
ZSE2
qThe case is made of polycarbonate.
Therefore, do not use it with or expose it to
•Pressure setting trimmer selects the ON pressure.
the following chemicals: paint thinner, carbon Clockwise rotation increases high vacuum set point.
tetrachloride, chloroform, acetic ester, aniline,
cyclohexane, trichloroethylene, sulfuric acid,
lactic acid, watersoluble cutting oil (alkalinic),
etc.
wDo not expose it to direct sunlight.
•Vacuum Pressure Setting
Caution
Observe the following precautions when
setting the vacuum pressure.
Lightly turn the screwdriver with your
fingertips. To prevent damage to the trimmer
groove, do not use a screwdriver that has a
large grip or a tip that does not fit in the
trimmer groove.
•When using the switch to confirm correct
adsorption, the set pressure should be as
low as possible. But not so low that a false
confirmation signal is given when
adsorption is incomplete.
High vacuum
Caution
Supply pressure
Steady adsorption
Set pressure
Unsteady adsorption
Non adsorption
Atmospheric pressure 0
3.1-13
Series
ZX
Guidelines for Use of Vacuum Pressure Switch Unit
System circuit for work
adsorption
Ejector style
Setting pressure
To use for picking verification, set the vacuum
pressure that can pick a workpiece without fail. In
some situations, the switch could turn ON even if the
picking is not complete.
Using a small diameter picking nozzle
External vacuum supply style
A nozzle that is used for picking electronic parts or
small precision parts could be even smaller than ø2. if
the nozzle diameter is approximately ø1, the pressure
difference between ON and OFF becomes smaller,
depending on the capacity of the ejector or the vacuum
pump. In such a case, it is necessary to use the
picking verification switch ZSP1, which provides a
small hysteresis and high precision. On the other hand,
an ejector with a large picking capacity will not be able
to detect properly, so an ejector with an appropriate
capacity must be used. Furthermore, it is necessary to
stabilize the pressure of the ejector and the vacuum
pump.
Using multiple pressure switches with a
single vacuum source
If a single vacuum source is divided so that vacuum
switches can be used on individual lines, the vacuum
pressure might not come within the values set with the
switches because the pressure of the vacuum source
fluctuates depending on the number of picks and
non-picks.
Especially, because pressure fluctuation exerts a great
influence when picking with a small diameter nozzle, the
countermeasures described below must be provided.
Vacuum pressure regulator
External vacuum supply system
Vacuum Pressure Switch/ZSE2-0X-15
•Adjust the needle valve to reduce the
pressure fluctuation between picking and
non-picking.
•Stabilize the source pressure by providing
a tank and a vacuum pressure reduction
valve (vacuum adjustment valve).
•Provide a vacuum switching valve to
individual lines. Thus, in case of an error,
each valve can be turned OFF to minimize
the influences on other pads.
Connector style: ZSE2-0X-15C
Symbol
3.1-14
Vacuum Pressure Switch Unit
Series
ZX
Built-in failure prediction output
function
If the attainable amount of vacuum reduces due
to a decrease in performance caused by
clogging of the silencer of the vacuum system
(ejectors), cracked pads, or the leakage of the
vacuum pipes, this function quickly detects the
abnormal condition and outputs a signal to halt
the system.
Two independent pressure settings
possible
Vacuum Pressure Switch
Specifications
Unit no.
Fluid
Hysteresis mode
Hysteresis
Wind comparator mode
Accuracy
Voltage
Port size
ZSE3-0X
Air, Inert gas
–101 to 0kPa
Variable (3 digit or more)
Fixed (3 digit)
±1% F.S. or less
12 to 24V DC (Ripple±10% or less)
M5
This feature is well suited for applications that
require 2 separate pressure outputs due to a
change in the vacuum suction pad diameters, or
for applications that require 2 pressure
verifications to effect line changes in the
positive pressure line.
•Weight
50g •Indicator light
Light at ON state
•Current consumption
25mA or less •Operating temperature range
•Max. operating pressure
0.2MPa
Comprehensive self diagnosis
function
Wiring
ZX
ZR
ZM
ZY
0 to 60°C
ZH
ZU
Overcurrent detection function
Overvoltage detection function
Data error
ZL
ZF
ZP
ZCU
CYV
Vacuum
related
Data saving function
Even if the power is cut off, the settings are
stored for 100,000 hours (approximately 11
years) in the exclusive IC (EEPROM).
•Filter Case
Caution
How to Order
•The case is made of polycarbonate.
Therefore, do not use it with or expose it to
the following chemicals: paint thinner,
carbon tetrachloride, chloroform, acetic
ester, aniline, cyclohexane, trichloroethylene,
sulfuric acid, lactic acid, watersoluble cutting
oil (alkalinic), etc.
•Do not expose it to direct sunlight.
ZSE3
0X
21
Output
NPN open collector 2 outputs/
21 Without analogue output
NPN open collector 2 outputs/
22 With analogue output
NPN open collector 1 output/
23 Trouble detection/Without analogue output
NPN open collector 1 output/
24
Trouble detection/With analogue output
-Q
Electrical entry
—
Grommet (0.6m)
Grommet (3m)
L
C
Connector (0.6m)
CL
Connector (3m)
CN
Without connector
Note) analogue output is available only for grommet
style.
How to Set Vacuum Pressure
Refer to p.3.0-0 on Best Pneumatics 4.
Guidelines for Use of Vacuum Pressure Switch Unit
Refer to p.3.1-14 on Best Pneumatics 3.
3.1-15
Series
ZX
Vacuum Pressure Switch/ZSE3-0X-21, 22, 23, 24
Grommet: ZSE3-0X-
3.1-16
Connector: ZSE3-0X-C
Ejector exhaust
Ejector System
Filter
Series
ZX
n
ctio
ne
ad
mp
cuu
Va ort
Vp
Without Valve Unit
Vacuum switch (ZSE2)
Configuration and Combination
Ejector unit
+ Filter unit (F)
E
F
Model
ZX1
con
Air
rt
po
PV
ply
p
su
Vacuum switch unit
Ejector unit
Circuit
(The circuits with other than vacuum switch are shown as below.)
ZX
Vacuum Switch (ZSE2)
ZX1앥E
ZR
ZM
ZY
ZH
ZU
ZL
ZF
ZP
ZCU
CYV
Vacuum
related
Note1) Remove the plug at external release. Note2) Dimensions ∗: For mounting brcket A ∗ ∗: For mounting spacer 1
Filter Unit (F)
ZX1–F
3.1-17
Series
Ejector
exhaust
ZX
Valve Unit: K1
Ejector unit
Model
ZX1
+ Valve unit (K1)
K1
ust
+
Filter unit (F)
Without switch and filter
E
D
F
None
ZX1–K1–E
Note) Dimensions ∗: For mounting bracket A
∗∗: For mounting spacer 1
3.1-18
tion
nec
on
dc
ha
t ex
Pilo port
E
P
ply
sup
Air port
PV
pa
uum
Vac ort
Vp
Ejector System
Series
ZX
ZX1–K1–D
ZX
ZR
ZM
ZY
ZH
ZU
ZL
ZF
ZP
ZCU
CYV
Vacuum
related
Filter Unit
ZX1–K1–F
Without Switch and Filter
ZX1–K1
3.1-19
Series
Ejector
exhaust
ZX
Valve Unit: K3
Ejector unit
Model
ZX1
+ Valve unit (K3)
K3
st
hau
t ex t
o
l
i
P por
PE
+ Filter unit (F)
E
F
None
ZX1–K3–E
3.1-20
uum
Vac ort
Vp
ply
sup
Air port
PV
co
pad
nne
ctio
n
Ejector System
Series
ZX
Filter Unit (F)
ZX–K3–F
ZX
ZR
ZM
ZY
ZH
ZU
ZL
ZF
ZP
ZCU
CYV
Vacuum
related
ZX1–K3
3.1-21
Series
External release
air supply Ejector
exhaust
ZX
Pilot air
supply
a
Valve Unit: K6
st
hau
t ex
Pilo port
PE
Ejector unit
Model
ZX1
+ Valve unit (K6)
K6
+ Filter unit (F)
E
F
None
ZX1 – K6 – E
Note) Dimensions ∗: For mounting bracket B
∗∗: For mounting spacer 2.
3.1-22
ply
sup
Air port
PV
tion
nec
on
dc
p
uum
Vac ort
Vp
Ejector System
Series
ZX
Filter Unit (F)
ZX1–K6–F
Filter Unit
ZX
6.8
ZR
ZM
8.8
11
66.2
ZH
Spacer 1
(For side mounting)
13
ZU
1∗∗
2
ZY
2-ø3.5
(Mounting hole)
20
41∗
51∗
ZL
ZF
2-R1.8∗
(Mounting hole)
1∗
10∗
19∗
ZP
ø3.6∗
(Mounting hole)
8.8∗
4.8∗
ZCU
CYV
Vacuum
related
2-ø3
(Mounting hole)
M5 (or M6)
(V port)
Vacuum pad
connection port
3
69.4∗
49.2
7∗∗
20∗
2
1∗
11.5∗
1∗∗
5.4∗
8
35.4∗
17.5 17
38
ZX1–K6
8∗
Bracket B
(Standard
accessory)
2-ø3.6
(Mounting hole)
3.1-23
Series
Air supply
for supply
valve pilot
ZX
Air supply
for release
valve pilot
Ejector
exhaust
rt
d o
pa V p
um tion
u
c c
Va nne
co
Valve Unit: K8
Ejector unit
+ Valve unit (K8)
ot st
Pil hau rt
x
e E po
P
+ Filter unit (F)
ly
pp
su ort
r
i
A Vp
P
Model
ZX1
E
F
K8
Circuit
(The circuits with other than
vacuum switch
are shown as below.)
Pilot port
None
Vacuum
switch (E)
Pilot port
ZX1–K8–E
Adsorption
confirmation switch (P)
78.6
31
Pressure detector
4.3
5.5
20
1∗∗
41∗
51∗
3 Pressure setting trimmer
10
21.6
M3
Supply valve
pilot port
(Release to
atmospheric
pressure)
Spacer1
(For side mounting)
M3
Release valve
pilot port
2-R1.8∗
(Mounting hole)
1∗
Filter
unit (F)
ø3.6∗
10∗
19∗
(Mounting hole)
7.6∗
13.6∗
Without
switch and filter
Vacuum switch
Release valve
(Air operated)
(Normally open)
VJA324
Manual override
(Non-locking)
63.5∗
M5 (or M6)
Bracket A
(V port)
(Standard accessory) Vacuum pad
connection port
Note) Dimensios ∗: For mounting bracket A
3.1-24
Release flow
adjusting needle
Interface
plate
18∗∗
4∗
15.5∗
10.2
(PE port)
Release valve
(Air operated)
VJA314
2-ø3.3
(Mounting hole)
M5 (or M6)
(PV port)
Air supply port
Ejector System
Series
ZX
Filter Unit (F)
ZX1–K8–F
ZX
ZR
ZM
ZY
ZH
ZU
ZL
ZF
ZP
ZCU
CYV
Vacuum
related
ZX1–K8
3.1-25
Series
Ejector
exhaust
ZX
Valve Unit: J1
Ejector unit
Model
ZX1
st
hau
t ex t
o
l
i
P por
PE
+ Filter unit (F)
+ Valve unit (J1)
t
pad por
um ion V
u
c
Va nect
con
ply
sup
Air port
PV
E
F
J1
None
ZX1–J1–E
Vacuum switch
ZSE2
Interface plate
28.5
5.8
18
6.5
59.5
(68.6)∗
17.6
M3
(PE port)
76
M5 (or M6)
(V port)
Vacuum pad
connection port
1
4.7
5
78
31
Pressure
setting trimmer
41∗
51∗
5.5
21.6
5.8
Circuit
(The circuits with other
than vacuum switch
Vacuum
switch (E)
Ejector + Silencer
1∗
2-R1.8∗
M5 (or M6)
(PV port)
Air supply port
Spacer 1
(For side mounting)
1∗∗
2
Mamual override
(Non-locking)
11.3
20
Bracket A
(Standard)
10
4∗
15.5∗
4.2
Release flow
adjusting needle
2-ø3.3
(Mounting hole)
18∗∗
10.2
64.6
Supply valve
VJ114
10∗
19∗
ø3.6∗
(Mounting hole)
17.6∗
13.6∗
(Mounting hole)
Adsorption
Pressure detector
Filter
unit (F)
(Release to
atmospheric
pressure)
Without switch
and filter
Note) Dimensios ∗: For mounting bracket A
3.1-26
Ejector System
Series
ZX
Filter Unit (F)
ZX1–J1–F
Filter Unit
ZX
ZR
6.8
ZM
8.8
11
ZY
2- ø3.5∗
(Mounting hole)
ZH
66.2
1∗∗
ZU
2-R1.8∗
(Mounting hole)
1∗
∗51
20
∗41
ZL
ZF
ZP
ø3.6∗
(Mounting hole)
10∗
ZCU
8.8∗
19∗
4.8∗
CYV
Vacuum
related
ZX1–J1
17
38∗∗
2- ø3
(Mounting hole)
3
1∗
20∗
7∗∗
1∗∗
69.4∗
50.4
11.5∗∗
5.4∗
8
17
35.4∗
38
50
M5 (or M6)
(V port)
Vacuum pad
connection port
Bracket B
8∗
2-ø3.6
(Mounting hole)
3.1-27
Series
ZX
Ejector
exhaust
d
Valve Unit: J2
Ejector unit
+ Valve unit (J2)
Model
ZX1
pa
um
u
c
Va port
V
t
ot
Pil haus r t
ex po
PE
+ Filter unit (F)
ion
ect
n
con
ply
up t
s
Air por
PV
E
F
J2
None
ZX1–J2–E
M3
(PE port)
99.6
2-ø3.3
(Mounting hole)
31
∗∗
Pressure setting
trimmer
PD
Spacer 1
(For side mounting)
20
41∗
51∗
23
5.8
Manual override
(Push and turn
the locking
type override)
50.8
50
58
59.5
17.6
10
M5 (or M6)
Bracket A
(V port)
(Standard accessory) Vacuum pad
connection port
Manual override
Release
flow adjusting needle
Interface
plate
PD
PE
1
5.8
25
28
PS
PV
6.5
18
18∗∗
4∗
15.5∗
4.2
Supply valve
(Normally open)
VJ324M
78.5
62
10.2
(82.5)∗
Vacuum switch
(ZSE2)
4.7
5
M5
(PV port)
Air supply port
Circuit
than vacuum switch
Vacuum
switch (E)
PE
ZSE2
PS
PV
2-R1.8∗
(Mounting hole)
1∗
10∗
19∗
ø3.6∗
(Mounting hole)
7.6∗
13.6∗
V
Adsorption
ZSP1
(Release to
atmospheric
pressure)
Pressure detector
V
Filter
unit (F)
ZX1-F
V
Without
switch and filter
V
3.1-28
Ejector System
Series
ZX
Filter Unit (F)
ZX1–J2–F
Filter
ZX
50
ZR
ZM
ZH
1∗∗
89
ZY
2-ø3.5
8.8 (Mounting hole)
11
20
41∗
51∗
ZU
ZL
ZF
2-R1.8∗
(Mounting hole)
1∗
10∗
19∗
ø3.6∗
(Mounting hole)
8.8∗
4.8∗
ZP
ZCU
CYV
Vacuum
related
3
7∗∗
50
20∗
91.2∗
1∗
11.5∗
1∗∗
M5 (or M6)
(V port)
Vacuum pad
connection port
5.4∗
8∗
17
35.4∗
38
17
ZX1– J2
Bracket B
8∗
2-ø3.6
(Mounting hole)
3.1-29
Series
ZX
Ejector System/Manifold
Functions
Max. number of units
Max. 8 units
Supply air from PV port of manifold
for common supply.
Function
Individual spacer R1
Separates air supply from manifold
and makes units be used one by one.
Function
Port
PV port
EXH port
Weight
Port size
1/8
1/8
Function
Air supply
Common exhaust
1 station: 73g (50g per additional station)
Notes) PD port: Blank
Exhaust air from both sides for 4 or more stations of ZX1103 manifold.
Air Supply
Supply port location
Manifold
Port
Right side
Left side
PV
PS
PV
PS
: Supply : Plugged (EXH port is released to atmospheric pressure.)
L (Light)
R (Right)
B (Both sides)
Note) Blank plugs are attached to all ports of each valve unit.
Manifold specification form
When ordering the manifold style of
series ZX, use the manifold
specification form on p.3.11-21
When using individual spacer R1
It functions as a single unit. Air is supplied from PV port of valve unit. PE port is released to
atmospheric pressure. Other ports are plugged.
Note) When using individual spacer R1, other valves should be provided with dummy spacer R16.
Functions are the same with the standard; common supply from the manifold.
How to Order Manifold
Indicate the vacuum module, blank plate and individual spacer below the manifold base part number.
〈Individual spacer〉
...
...
Number of stations
01 1 station
02 2 stations
08 8 stations
—
F
T
Port thread
Rc(PT)
G(PF)
NPTF
R
ZX1
Symbol
Port
location∗1
R
Right side
L
Left side
B
Both sides
Supply
PV port on
the right side
PV port on
the left side
PV port on
both sides
1
Arrangement
(First station from the right end of the
valve side is station 1.)
—
All stations
Station 1 only
1
8
Station 8 only
∗If more than one spacer is
required, specify all spacers.
∗1 To the valve unit.
∗2 EXH port is released to atmospheric
pressure. Plugs are attached to PD
ports and all ports of the valve unit.
(Ordering example)
ZXX106-R ································1 pc. (Manifold base)
∗ZX1101-K15LZ-EC ·················· 5 pcs. (Vacuum single unit)
∗ZX-BM1 ····································1 pc.(Blank plate)
First station from the valve side
3.1-30
R1
...
ZZX1 06
...
〈Manifold base〉
(Ordering example)
If installed on station 1 and station 3:
ZZX106-R ····················1 pc.
∗ZX1101- K15Z-EL ····· 6 pcs.
∗ZX1-R1-1
∗ZX1-R1-3
∗ZX1-R16 ····················4 pcs.
Ejector System
Series
ZX
Manifold/System Circuit Example
When not using individual air pressure supply
When using individual air pressure supply
ZX
Left
ZR
Left
ZM
ZY
Co
Dummy spacer R16 side
Co
mm
on
ex
ha
Co
us
mm
t
on
Right
su
pp
ly
mm
on
Co
ha
mm
Right
ex
on
su
pp
ly
us
t
t
ilo
u
ha
ex
st
P
iv
Ind
a
idu
la
ir s
p
up
Individual spacer R1 side
ZU
ZL
ZF
ZP
PV: Air supply port
PS: Supply valve supply pressure port
PD: Release valve supply pressure port
PE: Pilot exhaust port
EXH: Common exhaust port
〈System Circuit Example〉
ly
ZH
ZCU
Dummy spacer R16
CYV
Vacuum
related
〈System Circuit Example〉
Dummy spacer R16
3.1-31
Series
ZX
Ejector System
Manifold
Co
EX mmo
Hp n
ort
Co
PV mm
po on a
rt
ir s
up
ply
(mm)
Stations
Symbol
L1
L2
L3
3.1-32
1
33
45
50
2
54
66
71
3
75
87
92
4
96
108
113
5
117
129
134
6
138
150
155
7
159
171
176
8
180
192
197
Ejector System
(In case of individual air pressure supply)
Series
ZX
System Circuit Example
(Standard)
(Made to order)
(In case of individual vacuum
pressure supply)
B cross section
ZX
ZR
ZM
Pressure detector
Individual air
supply port: PV
Dummy Spacer R16
Pressure detector
ZY
ZH
Dummy spacer R16
Dummy spacer R16
ZU
ZL
Dummy Spacer R16
External relase port
External release port
Pilot port
Pilot port
ZF
ZP
A cross section
ZCU
Pilot exhaust port
(PE port)
Individual air supply
port: PV
Adapter D
Pitch=21
CYV
Vacuum
related
Individual air
supply port: PV
Adapator D
M5 (or M6)
Individual air supply port
(PV port)
M5 (or M6)
Individual air supply port
(PV port)
M5
(or M6)
M5
Vacuum pad
connection port (or M6)
(V port)
Vacuum pad
connection port
(V port)
Pitch
=21
M5
(or M6)
Adsorption nozzle
piping port
3.1-33
Series
ZX
nn
o
dc
n
tio
ec
n
tio
pa
ec
nn
um
co
cu rt
d
a
V po
pa
V
um
cu
Va port
V
Ejector System
Manifold: K1
Co
EX mm
H on
po
rt
Co
PV mmo
po n s
up
rt
p
ly p
ort
:
Lead wire length:
≅ 300
K1 type
ZZX1–
ZX1–K1L–E–
Vacuum switch
Filter unit
Vacuum pad
connection port
M5
(or M6)
Pitch=21
Common EXH port
(PV port)
Common air supply port
(Mounting hole)
Pressure setting trimmer
Manual override
Manifold base
End plate
(mm)
Stations
Symbol
L1
L2
L3
3.1-34
1
33
45
50
2
54
66
71
3
75
87
92
4
96
108
113
5
117
129
134
6
138
150
155
7
159
171
176
8
180
192
197
Ejector + Silencer
Ejector System
Series
ZX
Circuit
ZX
ZR
ZM
ZY
ZH
ZU
ZL
Relate valve
Supply valve
ZF
Release flow adjusting needle
ZP
ZCU
CYV
Vacuum
related
Pitch
3.1-35
Series
ZX
d ort
pa p
m nV
uu ctio
c
Va nne
d ort
pa V p
co
m
uu ction
c
Va nne
co
Ejector System
Co
EX mm
H on
po
rt
Co
PV mm
po on s
rt
up
ply
po
rt:
K3 type
ZZX1–
ZX1–K3–E–
Vacuum pad
connection port
M5
(or M6)
Pitch = 21
(mm)
Stations
Symbol
L1
L2
L3
3.1-36
1
33
45
50
2
54
66
71
3
75
87
92
4
96
108
113
5
117
129
134
6
138
150
155
7
159
171
176
8
180
192
197
Manifold: K3
Ejector System
Series
ZX
Circuit
ZX
ZR
ZM
ZY
ZH
ZU
ZL
ZF
ZP
ZCU
CYV
Vacuum
related
3.1-37
Vacuum Module
Series ZX/External Vacuum Supply System
How to Order
Component
Valve unit
N.C. style
Vacuum
switch unit
ZX100
K1
5 L Z
E C
-Q
Valve unit
N.O. style
Vacuum
switch unit
ZX100
K3
5 L Z
E C
-Q
Valve unit
N.C. style
Filter
unit
ZX100
K1
5 L Z
F
-Q
PV/V port size
Valve unit/Combination of supply valve and release valve
Refer toTable q on p.3.1-39 .
—
Y
Pilot valve
—
DC: 1W
(With light: 1.05W)
Y∗
DC: 0.45W
(With light: 0.5W)
Vacuum switch electrical entry
—
Grommet
L
C
CL
Connector
Without connector
CN
(without lead wire)
Voltage
5
6
V
S
R
• Refer to p.3.1-52 for
ordering the manifold.
• Refer to p.3.1-62 and 3.163 for ordering a unit for
replacement.
—
L
LN
Plug
LO
M connector
MN
MO
G
Grommet
H
—
•Refer to Table e on p.3.1-39
for part number of lead wire
with connector.
24V DC
12V DC
6V DC
5V DC
3V DC
Air operated
(K6, K8, J3, J4, D3, D4)
Electrical entry
Without lead wire
Without connector
Without lead wire
Without connector
Air operated
Note) In case of "K1" (combination of
supply and release valves), M type
plug connector can not be used.
• Refer to Table w on p.3.1-39 for part
number of lead wire with connector.
M5
M6 (Optional)
Vacuum switch unit/Filter unit
E
F
Vacuum pressure switch (General) With suction filter
Suction filter only
Vacuum digital pressure switch unit
2 outputs/Without analog output
21
D mmHg
2 outputs/With analog output
22
23 1 output (With trouble detection)/Without analog
DP kPa
24 1 output (With trouble detection)/With analog
Note) Analog output is available only for grommet style.
Manual override
—
B
—
None
With indicator light and
Z
surge voltage suppressor
S∗ With surge voltage suppressor
Caution
Surge voltage suppressor
DC style:
Match the polarity of the connectors according to the
+ and – marks on the connectors. Do not interchange the polarities to prevent the diodes or the
switching elements from becoming burned. If lead
wires are pre-connected, the red wire is + and the
Indicator light and surge voltage suppressor black wire is – .
3.1-38
Series
ZX
Table 1. Valve unit/Combination of supply valve and release valve
Components
Symbol
Supply valve
Release valve
Solenoid
(Normally closed)
Solenoid
(Normally open)
Air operated
(Normally closed)
Air operated
(Normally open)
Solenoid
(Normally closed)
Solenoid
(Normally closed)
Supply valve
Air operated
Solenoid
N.O
N.C.
N.C.
N.O.
(VJ324)
(VJ114) (VJ324) (ZX1A)
None
Solenoid
N.C.
N.C.
(VJ114) (VJ314)
Release valve
Air operated External release
N.C.
None
ZX1A
(VJA314)
K1
–
–
–
–
–
–
–
–
K3
–
–
–
–
–
–
–
–
External release
K6
–
–
–
–
–
–
–
–
Air operated
(Normally closed)
K8
–
–
–
–
–
–
–
–
–
ZX
ZR
ZM
ZY
ZH
Without valve unit
ZU
Table 2. Valve unit/Lead wire with connector
Connector ass'y part No.
(For DC)
VJ10 20 4A 6
How to order
If ordering vacuum module with
600m or the longer lead wire,
specify both vacuum module and
connector ass'y part numbers.
(Ordering example)
ZX100-K15LOZ-EC············ 1 pc.
∗VJ10-20-4A-6··················· 2 pcs.
Lead wire length
—
6
10
15
20
25
30
0.3m (Standard)
0.6m
1m
1.5m
2m
2.5m
3m
Table 3. Vacuum switch/Lead wire with connector
ZS 10 5A
ZF
Lead wire length
—
30
50
ZP
0.6m
3m
5m
ZCU
Note) If ordering switch with 5m lead
wire, specify both switch and lead
wire with connector part numbers.
(Ordering example)
ZX100-K150Z-ECN··········1 pc.
∗VJ10-20-4A-6················ 2 pcs.
∗ZS-10-5A-50···················1 pc.
CYV
Vacuum
related
External Vacuum Supply System/Recommended Model (The models below will have faster delivery.)
Model
ZX100-K15LZ-F
ZX100-K15LZ-EC
ZX100-K35MZ-EC
Combination
Solenoid valve Electrical entry
Indicator light and
rated voltage
(lead wire) surge voltage suppressor
(Pilot valve) (Direct operated)
N.C.
N.C.
With
(VJ114)
(VJ114)
indicator light
Plug
N.C.
N.C.
and
connector
24V DC
(VJ114)
(VJ114)
surge voltage
type
N.O.
N.C.
suppressor
(VJ324)
(VJ314)
ZX100-K15LZ-E
Vacuum switch
unit/Filter unit
Electrical
entry
(switch)
Suction filter
(ZX1-F)
Vacuum switch
(ZSE)
ZL
Connector style
ZX100-K35MZ-E
3.1-39
Series
ZX
External Vacuum Supply System/Combination of supply valve and release valve
An N.C. solenoid valve is used for the supply valve. Also, an N.C.
solenoid valve is used for the vacuum release valve.
Application: This combination is used for effecting control in
accordance with electric signals.
An external 3 port valve must be provided to serve as the supply
valve. Also, an external 2 port valve (vacuum valve) must be provided
to serve as the vacuum release valve.
Application: This combination is used for effecting control in
accordance with electric signals.
How to operate
How to operate
Valve
Condition
2. Vacuum release
3. Operation stop
Supply valve
Solenoid valve
ON
OFF
OFF
Release valve
Solenoid valve
OFF
ON
OFF
Valve
Condition
2. Vacuum release
3. Operation stop
Supply valve
Solenoid valve
ON
OFF
OFF
Release valve
Solenoid valve
OFF
ON
OFF
An N.O. solenoid valve is used for the supply valve. Also, an N.C. solenoid
valve is used for the vacuum release valve.
Application: This combination is used for effecting control in accordance
with electric signals. Because the supply valve is N.O., the pressure that is
supplied to the ejector is not interrupted during a power outage; as a result,
the state of suction can be maintained. This combination is used for
preventing the workpieces from dropping during power outages.
An air operated N.O. valve is used as the supply valve. An air operated
N.C. valve is used for the vacuum release valve.
Application: This combination is used for effecting control in accordance
with electric signals. Because the supply valve is N.O., the pressure that is
supplied to the ejector is not interrupted during a power outage; as a result,
the state of suction can be maintained. This type is used for preventing the
workpieces from dropping during power outages.
How to operate
Valve
Condition
2. Vacuum release
3. Operation stop
3.1-40
How to operate
Supply valve
Solenoid valve
OFF
ON
ON
Release valve
Solenoid valve
OFF
ON
OFF
Valve
Condition
2. Vacuum release
3. Operation stop
Supply valve
Air operated valve
OFF
ON
ON
Release valve
Air operated valve
OFF
ON
OFF
ZX
Series
External Vacuum Supply System/Construction
ZX
ZR
ZM
ZY
ZH
ZU
ZL
Component Parts
No.
Description
Material
Note
Poppet valve assembly
—
ZX1-PV-O
Release flow adjusting needle Stainless steel
Aluminum
Manifold
Vacuum switch
—
ZSE2, ZSP1
ZX1-VB-D-
Valve unit
—
Interface plate
(PV)/(PS PD)
—
Return spring
Stainless steel
Polycarbonate
Filter case (1)
Table1: How to order pilot valve
No.
1
2
3
4
Component
Model
Combination
Solenoid valve Solenoid valve
ZX1-VJ114-
K1, J1
N.C. (VJ114) N.C. (VJ114)
ZX1-VJ31
K3, J2
2 4-
N.O. (VJ324) N.C. (VJ314)
Air
operated
Air operated
ZX1-VJA31
K6
24
N.O. (VJA324) N.C. (VJA314)
Air
operated
Solenoid valve
No. 2 and 3 models only are applicable.
Air operated Solenoid valve Indicate the each part number.
Table 3: How to order air operated valve
No.
Description
Pilot valve
Filter element
PVF
ZX1-VJ114
5 L Z
-Q
ZX1-VJ3 2 4
5 L Z
-Q
Type of actuation
N.C. (Normally closed)
1
N.O. (Normally open)
2
__
M
Individual exhaust
for pilot valve
Common exhaust for
main and pilot valves
Note)In case of N.C.
style, indicate no
symbol. (Individual
exhaust for Pilot
valve)
Voltage
5
6
V
S
R
24V DC
12V DC
6V DC
5V DC
3V DC
Caution
Turning the vacuum release flow volume adjustment needle clockwise
reduces the vacuum release flow volume; the needle valve is fully closed
when the needle stops turning. Turning the needle 2 full turns
counterclockwise from the fully closed position renders the needle valve
fully open. The needle will fall out if it is turned more than 4 full turns.
__
Y∗
DC: 1W
(With light: 1.05W)
DC: 0.45W
(With light: 0.5W)
ZCU
Vacuum
related
Indicator light and surge voltage
suppressor
—
None
S
W/ indicator light/surge suppressor
Z
Body option
ZP
CYV
Manual override
__
B
Pilot valve
Pilot port/External
release port
Part No.
Refer to Table 2 and 3.
ZX1-FE
—
Table 2: How to order solenoid valve
Port size
M3
M5
Material
Note 1) • The case is made of polycarbonate. Therefore, do not use
it with or expose it to the following chemicals: paint thinner,
carbon tetrachloride, chloroform, acetic ester, aniline,
cyclohexane, trichloroethylene, sulfuric acid, lactic acid,
watersoluble cutting oil (alkalinic), etc.
• Do not expose it to direct sunlight.
ZX1A M3
M3
M5
ZF
Replacement Parts
Electrical entry
Connector (0.3m)
L
Connector (w/o lead wire)
LN
Without connector
LO
Connector (0.3m)
M
MN Connector (w/o lead wire)
Without connector
MO
Grommet (0.3m)
G
Grommet (0.6m)
H
Note) In case of "ZX1VJ114", M, MN and
MO cannot be used.
∗24V DC and 12V DC are applicable to 0.45W.
Note) Screw length of VJ100 and VJ300 for
series ZX is different from that of the
standard model.
<Screw length> VJ100-M1.7 X 15
VJ300-M1.7 X 22
3.1-41
Series
ZX
Valve Unit/ZX1-VB
Refer to p.3.1-10 for details.
Specifications
Unit No.
Components
Operation
Effective area mm2
Flow Q (Nl/min)
Max. operating frequency
Interface plate symbol
Standard accessory
d
ot
Pil ust
ha rt
Ex po
PE
ply
up ply
ir s sup
a
m
lve
va acuu ort
m
p
uuort V PV
c
Va S p
P
um
cu
Va port
A
pa
on
n
ot
Pil aust
t
exh por
PE
ly
p
sup
ly
air supp
e
v
m
val
u
m
cu rt
cuu t VaV po
Va por
P
PS
m
cuu
Va port
A
p
c
ad
ctio
ne
on
K1 (Normally closed)
∗∗: For mounting interface
3.1-42
_
cti
ne
n
co
ZX1-VB
Vacuum supply valve
Vacuum release valve
Pilot operated
Direct operated
Air operated
Solenoid vlave
Solenoid valve External
Air
N.C.
N.O.
N.C.
N.O.
N.C
N.C.
release operated
(VJ114) (VJ234) (ZX1A) (VJA234) (VJ114) (VJ314) (ZX1A) (VJA314)
0.07
0.45
3 (163.3) Main valve
(3.8)
(24.5)
0.3 to 0.6MPa
5Hz
5 to 50° C
(PV)/(PS PD)
Bracket B/Spacer 2
K3 (Normally open)
Suction Filter Unit/ZX1-F
ZX
Series
Specifications
Unit no.
Filtration efficiency
Element
Weight
ZX1-F
Vacuum to 0.5MPa
5 to 50°C
30µm
PVF
35g
ZX
Note) If not operated within the specified range of pressure and temperature, trouble may result.
ZR
ZM
ZY
ZH
Vacuum Pressure Switch Unit/ZSE2, ZSE3
Refer to p.3.1-13 to 3.1-16 for details.
ZL
Vacuum Pressure Switch Vacuum Pressure Switch
Specifications
High speed response/10ms
Unit no.
Uses a carrier diffusion
Fluid
semiconductor pressure sensor
Hysteresis
Accuracy
Voltage
Port size
ZU
Refer to p.3.0-0 on Best Pneumatics 4 for details.
ZSE2-0X
ZSE3-0X
Air
0 to –101kPa
3% Full span or less
±1%
Full span
12 to 24VDC (Ripple ± 10% or less)
M5
Note) If not operated within the specified range of pressure and temperature, trouble may be caused.
3.1-43
ZF
ZP
ZCU
CYV
Vacuum
related
Series
ZX
Valve Unit: K1
Valve unit (K1)
Model
ZX100
K1
+ Vacuum switch (ZSE3)
Filter unit (F)
E
D
F
ZX100–K1–E
Note) Dimensions ∗: For mounting bracket A,
3.1-44
t
aus
exh
t
o
t
l
Pi por
PE
air
ly
alve ort
v
upp
uum PS p uum s
c
a
V pply
Vac port
su
PV
ad ort
m p on V p
u
u
i
Vac nnect
co
Series
ZX
ZX100–K1–D
ZX
ZR
ZM
ZY
ZH
ZU
ZL
ZF
ZP
ZCU
CYV
Vacuum
related
Filter Unit (F)
ZX100–K1–F
3.1-45
Series
ZX
Valve Unit: K3
ust
Configuration and Combination Vacuum switch (ZSE2)
Valve unit (K3) + Filter unit (F)
Model
ZX100
K3
ha
t ex
Pilo por t
E
P ir
a
alve rt
ply
v
o
m
sup
p
u
u PS
m
c
u
a
u
V ply
Vac port
sup
PV
pad por t
uum on V
Vac nnecti
co
E
F
Circuit
ZX100–K3–E
3.1-46
(The circuits with other than
vacuum switch are shown
as below.
Series
ZX
Filter Unit (F)
ZX100-K3–F
Filter unit
ZX
ZR
6.8
ZM
ZY
11
8.8
2-ø3.5
(Mounting hole)
ZH
77
ZL
51∗
20
41∗
1∗∗
ZU
ZF
ZP
2-R1.8∗
(Mounting hole)
1∗
10∗
19∗
ZCU
ø3.6∗
(Mounting hole)
8.8∗
CYV
4.8∗
Vacuum
related
3.1-47
Series
ZX
Pilot air
supply
External release
air supply
Valve Unit: K6
Configuration and Combination Vacuum switch (ZSE2)
Valve unit (K6) + Filter unit (F)
Model
ZX100
Circuit
ply
External release (The circuits with other
port
than vacuum switch
p
su
E
F
K6
um
cu
Va por t
V
ot st
Pil hau r t
ex po
PE
on
cti
ne
n
o
dc
pa
um
cu r t
Va po
PV
Pilot port
Vacuum
switch (E)
Filter unit (F)
ZX100–K6–E
Vacuum switch
(ZSE2)
Supply valve
Air operated (ZX1A)
Release valve
External release
(ZX1A)
2-ø3.3
(Mounting hole)
17.6
66
13
31
Spacer 1
(For side mounting)
5.5
10
1∗∗
Pressure setting
trimmer
20
41∗
51∗
M3 X 0.8
Pilot port
M3 X 0.8
External release
port
Vacuum switch
(ZSE2)
2-R1.8∗
(Mounting hole)
3.1-48
5.8
25
M3
(PE port)
1
4.7
5
2
21.6
58
28
6.5
10
59.5
50
(63.5)∗
4∗
M5 (or M6)
(V port)
Bracket A
(Standard accessory) Vaccum pad
connection port
4.2
Interface plate
18
15.5∗
18∗∗
10.2
Release flow
adjusting needle
ø3.6
(Mounting hole)
1∗
10∗
19
13.6∗
M5 (or M6)
(PV port)
Vacuum supply port
Filter Unit (F)
ZX100–K6–F
Series
ZX
Filter unit
6.8
ZX
11
8.8
ZR
ZM
2-ø3.5
(Mounting hole)
ZY
54.2
ZH
51∗
20
41∗
ZU
ZL
ZF
2-R1.8∗
(Mounting hole)
1∗
ZP
ø3.6∗
(Mounting hole)
10∗
19∗
ZCU
8.8∗
4.8∗
CYV
Vacuum
related
3.1-49
Series
ZX
Air supply
for supply
valve pilot
Air supply
for release
valve pilot
Valve Unit: K8
Configuration and Combination Vacuum switch
+ Filter unit (F)
Valve unit (K8)
Model
ZX100
E
F
K8
None
um
cu t
Va por
V
ot st
Pil hau r t
ex po
(ZSE2)
PE
ly
pp
ly
u
s
pp
r
i
su
ea
m
v
l
u
va
cu r t
Va V po
um
cu or t
P
a
V Sp
P
n
tio
ec
n
on
dc
pa
Circuit
than vacuum switch
ZX100–K8–E
31
M3
Pilot port
for release valve
22
25
5.8
M3
(PE port)
4.7
5
M5 (or M6)
(PV port)
Vacuum supply port
Spacer 1
(For side mounting)
1∗∗
3
5.5
21.6
10
4.3
M3
Pilot port
for supply valve
Release flow
adjusting needle
M3
(PS port)
Vacuum valve
air supply port
50
59.5
18
2-ø3.3 (Mounting hole)
Release valve
(Air operated)
VJA314
Interface
plate
28
17.6
66.6
2-R1.8∗
(Mounting hole)
1∗
3.1-50
58
50
56.5
10
M5 (or M6)
(V port)
Vaccum pad
connection port
20
Bracket A
Supply valve
(Air operated) (N.O.)
VJA324
Manual override
(Non-locking)
41∗
51∗
4.2
4∗
6.5
15.5∗
18∗∗
10.2
63.5∗
Vacuum switch
(ZSE2)
ø3.6∗
(Mounting hole)
10∗
19∗
7.6∗
13.6∗
∗∗: For mounting spacer1.
Filter Unit (F)
ZX100–KB–F
Series
ZX
Filter unit
6.8
ZX
8.8
11
ZR
2-ø3.5∗
Mounting hole
ZM
ZY
ZH
55
ZF
ZP
2-R1.8
(Mounting hole)
∗1
ZL
51∗
20
41∗
1∗∗
ZU
10∗
19∗
ø3.6∗
(Mounting hole)
8.8∗
4.8∗
ZCU
CYV
Vacuum
related
3.1-51
Series
ZX
External Vacuum Supply System/Manifold
Functions
Max. number of units
Function
Max. 8 units
Vacuum supply from PV port of the manifold is common supply.
Air supply from PS port is common supply.
Separates air supply from manifold and makes units be
used one by one.
Function
Port
PV port
PS port
EXH port
Weight
Port size
1/8
M5
1/8
Function
External vacuum pump connection
Air supply for vacuum valve
Common exhaust
1 station: 73g (50g per additional station)
Notes) PD port: Blank
Vacuum from both sides of PV port for 6 or more stations of ZX100 external vacuum pump manifold.
Air Supply
Manifold
L
R
B
Port
Left side
PV
Right side
PS
PV
PS
쎻: Vacuum supply from PV port
쎻: Air supply from PS port
쏹: Plugged (EXH port is released to atmospheric pressure.)
Note) All ports for each valve unit are provided with plugs.
When using individual spacer R1
It functions as a single unit. Vacuum is supplied from PV port of valve unit. PE port is released to
atmospheric pressure. Other ports are plugged.
How to Order Manifold
Indicate the vacuum module, blank plate and individual spacer below the manifold base part number.
<Manifold base>
<Individual spacer>
08 8 stations
Port thread
—
F
T
Rc(PT)
G(PF)
NPTF
Supply
Port
Symbol
location∗1 Vacuum supply Air supply
PV port on
PS port on
R Right side
the right side the right side
PV port on
PS port on
L Left side
the left side the left side
PV ports on PS ports on
B Both sides
both sides
both sides
∗1 To the valve unit.
∗2 EXH port is released to atmospheric
pressure. Plugs are attached to PD
ports and all ports of the valve unit.
(Ordering example)
ZZX106-R........................ 1 pc. (Manifold base)
∗ZX1101-K15LZ-EC........ 5 pcs. (Vacuum single unit)
∗ZX-BM1.......................... 1 pc.(Blank plate)
3.1-52
ZX1
R1
1
Location
(First station from the right end
of the valve side is station 1.)
—
1
8
All stations
Station 1 only
...
...
...
Number of
stations
01 1 station
02 2 stations
R
...
ZZX1 06
Station 8 only
∗If more than one spacer
is required, specify all
spacers.
(Ordering example)
If mounted on station 1 and station 3:
ZZX106-R......................... 1 pc.
∗ZX1101-K15LZ-EC.......... 6 pcs.
∗ZX1-R1-1
∗ZX1-R1-3
∗ZX1-R16......................... 4 pcs.
Series
ZX
Manifold/System Circuit Example
When not using individual air pressure supply
When using individual air pressure supply
Left
Left
ZX
ZR
Dummy spacer R16 side
Co
mm
Com
mo
na
Com
Right
mon
exh
ir s
uum
ZM
Co
mm
on
au
upp
vac
PV: Vacuum supply port
PS: Air supply port for vacuum valve
PD: Air supply port for release valve
PE: Pilot exhaust port
EXH: Common exhaust port
on
ly fo
r va
sup
ply
exh
aus
t
upp
Right Co
ly fo
r va
mm
cuu
on
mv
vac
alve
uum
sup
ply
Com
st
cuu
mv
alve
t
us ve
l
ha
va
ex
ly
t
m
o
pp
Pil
uu
su
c
a
m
v
u
for
cu
ly
va
Individual spacer R1 side
pp
al
u
u
s
d
ivi
Air
d
In
mon
air s
ZY
ZH
ZU
ZL
ZF
Dummy spacer R16
ZP
ZCU
<System Circuit Example>
<System Circuit Example>
CYV
Vacuum
related
3.1-53
Series
ZX
Manifold
Co
mm
mm on
on EX
Co
air H
mm
su
on
pp
va
ly
cu
for
um
va
su
cu
pp
um
ly
Co
va
lve
Supply valve (VJ114)
(N.C.)
Release valve (VJ114)
(N.C.)
Release flow
adjusting needle
M5
(PD port)
Release valve (VJ314)
(N.C.)
Supply valve (VJ324M)
(N.O.)
Manual override
(Simply turn the locking
style override.)
2- 1/8
Common
EXH port
Pitch = 21
2- 1/8
Common vacuum supply port
(PV port)
2-M5
Common supply port for vacuum valve
(PS port)
M5 (or M6)
Individual vacuum supply port
(PV port)
End plate
Manifold base
4-ø5.5 (Mounting hole)
Adjusting needle
Adsorption confirmation switch ZSP1
Pitch = 21
Manual override
(Push and
turn the locking
style override.)
Manual override
(Simply turn the locking
override.)
Body (Air operated )
ZX1A
M5
(Pilot port)
M5
(External release port)
Vacuum switch ZSE2
Filter
Adapter B
Adapter D
(mm)
Stations
Symbol
L1
L2
L3
3.1-54
1
33
45
50
2
54
66
71
3
75
87
92
4
96
108
113
5
117
129
134
6
138
150
155
7
159
171
176
8
180
192
197
(In case of individual air pressure supply)
B cross section
ZX
Series
System Circuit Example
(Standard)
(Made to order)
(In case of individual vacuum
pressure supply)
ZX
ZR
ZM
Dummy spacer R16
Pressure detector
Dummy spacer R16
Individual vacuum
supply port: PV
Dummy spacer R16
Pressure detector
ZY
ZH
ZU
ZL
A cross section
ZF
Dummy spacer R16
External release
port
Pilot
port
ZP
External release
port
ZCU
Pilot
port
CYV
Vacuum
related
Pitch
= 21
M5 (or M6)
(V port)
M5 (or M6)
(V port)
M5 (or M6)
Individual vacuum supply
port (PV port)
M5 (or M6)
Individual vacuum supply port
(PV port)
Individual vacuum
supply port: PV
Adapter D
Individual vacuum
supply port: PV
Adapter D
Pitch = 21
M5 (or M6)
Adsorption nozzle
piping port
3.1-55
Series
ZX
Manifold: K1
Co
mm
Co
o
mm n EX
H
on
sup
Co
mm
ply
for
on
vac
vac
uu
uu
m
m
sw
sup
itch
ply
ing
K1 type
ZZX1–
ZZX100-K1L–E–
12
10.7
Vacuum pad
connection port
M5
(or M6)
4.5
Pitch = 21
22.5
(mm)
Stations
L1
L2
L3
3.1-56
n
o
cti
pa
ne
um
on
c
cu t
a
d
V or
pa
V p um
cu t
a
r
V po
V
Symbol
n
tio
ec
nn
o
dc
1
33
45
50
2
54
66
71
3
75
87
92
4
96
108
113
5
117
129
134
6
138
150
155
7
159
171
176
8
180
192
197
po
rt
Series
ZX
ZX
Circuit
ZR
PV EXH
PS PD
ZM
PD
ZY
ZH
ZU
PE
ZL
ZF
PS
PV
ZP
V
ZCU
CYV
PD
Vacuum
related
PE
PS
PV
V
PS PD
PV EXH
3.1-57
Series
ZX
pad port
uum tion V
c
a
c
V ne
con
ion
ect
onn
c
pad
uum
Vac ort
Com V p
mon
E
Co XH po
Com
for mmon rt
vac air
PV mon v
uum sup
por
acu
valv ply
t
um
eP
sup
Sp
ply
ort
External Vacuum
K3 type
Supply System Manifold: K3
10
12
21.5
33
10.7
60
79
Vacuum pad
connection port
M5 X 0.8
(or M6)
62.5
ZZX1–
ZX100-K3–E–
2- 1/8
Common EXH port
22.5
37.4
2-M5
3
2- 1/8
(PV port)
Common vacuum supply port
44
(PS port)
Common supply port for vacuum valve
106.7
4-ø5.5
(Mounting hole)
61.1
45.1
32
14
6
Manifold base
End plate
(mm)
Stations
Symbol
L1
L2
L3
3.1-58
1
33
45
50
2
54
66
71
3
75
87
92
4
96
108
113
5
117
129
134
6
138
150
155
7
159
171
176
8
180
192
197
(44)
L3
L2
Pitch=21
21.6
10
20
6
23
10
L1
Manual override
(Push and turn
the locking style
overide.)
6.5
Pitch = 21
4.5
4.5
Series
ZX
ZX
ZR
Circuit
17.5
10
ZM
ZY
Supply valve
VJ324M
Manual override
ZH
Release valve
VJ314
ZU
Release flow
adjusting needle
ZL
ZF
51.3
ZP
28.5
ZCU
CYV
20
22.5
21
Pitch = 21
Vacuum
related
5
3.1-59
ZX
Series
Ejector System/Unit Construction (Refer to below for unit replacement.)
Single
How to order G
Philips screw
M2.5 X 63
How to order J
Digital vacuum switch unit (For replacement)
ZSE3-O X -쏔쏔쏔-D
Adsorption confirmation switch unit (For replacement)
ZSP1-쏔OX-15쏔-D
How to order H
Vacuum switch unit
Philips screw (For replacement)8
M2.5 X 63
ZSE2-OX-15쏔-D
Philips screw
M2.5 X 51
Filter unit (For replacement)
ZX1-F-D
How to order G
Valve unit (Supply valve: N.O.) (For replacement)
Philips screw
P3270148-39
(M2.5 X 39)
ZX1-VAK3쏔쏔쏔쏔-D-S
Plate A
P3200150
Philips screw
M2.5 X 14
How to order A
Ejector ass'y
ZX1-WD쏔쏔쏔
How to order G
Valve unit (Supply valve: N.C.)
(For replacement)
ZX1-VAK1쏔쏔쏔쏔-D-S
How to order G
Valve unit (Supply valve:Air operated) (For replacement)
ZX1-VAK6-D-S
How to Order Unit for replacement
G Valve unit
ZX1 V A K1
5 L Z B D S
Single
(PD and PS ports are equipped with plugs.)
For ejector system
DC: 1W
(With light: 1.05W)
DC:0.45W
(With light: 0.5W)
5
6
V
S
R
Voltage
24V DC
12V DC
6V DC
5V DC
3V DC
05
07
10
ZSE2 0X 15 C D
Unavailable
Available
Electrical entry
L plug connector
L
0.5mmø
0.7mmø
1.0mmø
1 Built-in silencer
Individual EXH
2
Rc(PT) 1 8
H Vacuum switch unit
—
Z
Ejector EXH
Unit for replacement
Nozzle size
Manual override
—
B
Pilot valve
Y∗
ZX1 W D 05 1
Refer to p.3.1-6 for details
_
A Ejector assembly
Q
Q
entry
_Electrical
Grommet (0.6m)
JDigital vacuum switch unit
ZSE3 0X
Pressure
indication
_
mmHg
P
kPa
21 C D
C
Q
L
Grommet (3m)
C Connector (0.6m)
CL Connector (3m)
CN Without connector
Connector (0.6m)
Output
2 outputs/Without analogue output
21
2 outputs/With analogue output
22
23 1 output (With trouble detection)/Without analogue
Note) analogue output is available only on grommet style.
D: Unit for replacement.
Ex.) If an adsorption confirmation switch is replaced for a vacuum switch
on ZX1071-K15LZ-PBC, indicate as ZSE2-OX-15C-D.
In this case, mounting screws P3270148-49 (2 pcs.) are required.
If the unit is used on its own, not combined with others, "D" is not required.
(Valve unit, ejector ass'y and switch unit)
Ex.) ZSE2-OX-15C, ZX1-VAK15LZ, ZX1-WO51
3.1-60
Ejector System
Manifold
Philips screw
M2.5 X 63
How to order O Digital vacuum switch unit (For replacement)
ZSE3-OX-쏔쏔쏔-D
Philips screw
M2.5 X 14
Series
ZX
How to order H
unit (For replacement)
ZSP1-쏔OX-15쏔-D
Philips screw
M2.5 X 63
How to order J
Vacuum switch unit (For replacement)
ZSE2-OX-15쏔-D
Philips screw
M2.5 X 51
Filter unit (For replacement)
ZX1-F-D
Philips screw
P3270148-39 (M2.5 X 39)
Adapter B
P3200130- 12
How to order A Ejector ass'y
ZX1-WD쏔쏔쏔
ZX
ZR
ZM
Philips screw
M 2.5 X 20
Philips screw
P3200152-12
(M2.5 X 28)
ZY
ZH
Adapter B
P3200130-P
ZU
Philips screw
P3200152-7
(M2.5 X 8)
How to order G
Valve unit
(Supply valve: N.O.)
(For replacement)
ZL
How to order M Manifold base
ZZX1쏔쏔쏔쏔쏔-A-쏔
ZX1-VAK3쏔쏔쏔쏔-D-M
Philips screw
P3200152-12 (M2.5 X 28)
ZF
ZP
Blank ass'y
How to order G
Valve unit (Supply valve: N.C.) (For replacement)
ZX1-VAK1쏔쏔쏔쏔-D-M Philips screw
P3200152-12 (M2.5 X 28)
Adapter D Note)
How to order G
Valve unit (Supply valve: Air operated)
(For replacement)
Philips screw
ZX1-VAK6-D-M
M2.5 X 28
P3200159- 14
Individual
spacer R1
ZX1-R1
Adapter D
Philips screw P3200159-P
M2.5 X 12
ZX1-R1
Adapter D individual spacer R1 ass'y
Ass'y no. ZX1-DR1
ZX1-BM1
ZCU
Notes) Common EXH port is open for common EXH type and closed for
individual EXH type. Common EXH is applicable only to ejector
system common EXH type.
M5: Suffix -4
M6: Suffix -1
M5: Suffix -1
M6: Suffix -2
CYV
Vacuum
related
G Valve unit
∗ Refer to p.3.1-10 for details.
ZX1 V A K1
5 L Z B D M
Q
Manifold
(All ports are equipped
with plugs.)
For ejector system
Pilot valve
Manual override
Rated voltage
Electrical entry
J Vacuum switch unit
M Manifold base
ZZX1 05
R A C
Number of stations
01
Exhaust
1
...
...
08
8
For ejector system
(PD and PS ports are equipped
with plugs.)
Port thread
—
F
T
Rc (PT) 1/8
G(PF)
NPTF
A Ejector assembly
R
L
B
Right side
Left side
Both sides
Unit for
replacement
Nozzle dia.
0.5mm
0.7mm
1.0mm
—
C
Individual exhaust
Common exhaust
Electrical
entry
—
Grommet (0.6m)
L
Grommet (3m)
C
Connector (0.6m)
CL
CN
Connector (3m)
Without connector
Q
Unit for
replacement
O Digital vacuum switch unit
ZSE3 0X
21 C D
Q
Electrical entry
ZX1 W D 05 1
05
07
10
ZSE2 0X 15 C D
Ejector exhaust
Pressure
indication
1
Built-in silencer
—
mmHg
2
Individual exhaust
Rc(PT)1/8
P
kPa
3
Manifold
common exhaust
C
Connector (0.6m)
Output
21
22
3.1-61
Series
ZX
External Vaccum Supply System/Unit Construction (Refer to below for unit replacement.)
Single
q Valve unit
ZX1 V B K1
5 L Z B D S
For external vaccum
supply system
Combination of supply valve
and release valve
Single
(PD port is equipped with plug.)
(Refer to p.3.1-40 for details.)
Manual override
Non-locking push type
Locking slotted type
Pilot valve
—
Y∗
—
B
DC: 1W
(With light: 1.05W)
DC: 0.45W
(With light: 0.5W)
Voltage
5
6
V
S
R
Q
—
Z
Unavailable
Available
Electrical entry
L
L plug connector
24V DC
12V DC
6V DC
5V DC
3V DC
e Digital vaccum switch unit
ZSE3 0X
21 C D Q
Electrical entry
C Connector (0.6m)
Plessure indication Output
2 outputs/ Without analogue output
21
– mmHg 22
2 outputs/ With analogue output
23 1 output (With trouble detection)/ Without analogue
P
kPa
24 1 output (With trouble detection)/ With analogue
D: Unit for replacement
Ex.) If an adsorption confirmation switch is replaced for a
vaccum switch on ZX1071-K15LZ-PBC, indicate as ZSE2-0X15C-D. In this case, mounting screws P3270148-49 (2 pcs.) are
required.
If the unit is used on its own, not combined with others, "D" is not
required.
Ex.) ZSE2-0X-15C, ZX1-VAK15LZ
3.1-62
Series
ZX
Manifold
ZX
ZR
ZM
ZY
ZH
ZU
ZL
ZF
ZP
ZCU
Note1) M5: Suffix -4
M6: Suffix -1
Note2) M5: Suffix -1
M6: Suffix -2
Vacuum
related
q Valve unit
r Vacuum switch unit
ZX1 V B K1
5 L Z B D M
For external
vacuum supply system
Manifold
Voltage
Refer to p.3.1-52
for details.
Electrical entry
L
C
CL
CN
Manual override
Grommet (0.6m)
Grommet (3m)
Connector (0.6m)
Connector (3m)
Without connector
Q
Unit for
replacement
t Digital vacuum switch unit
R B
Number of stations
01 1 station
Port thread
Rc (PT)1 8
G (PF)
F
NPTF
T
_
—
w Manifold base
ZZX1 06
Electrical entry
All ports are equipped
with plugs.
Pilot valve
08 8 stations
ZSE2 0X 15 C D
Q
ZSE3 0X
R Right side
L
Left side
B Both sides
For external vacuum
supply system
PD port is equipped
with plug.
21 C D
Q
Unit for
replacement
Electrical entry
C Connector (0.6m)
Output
mmHg 21
22
kPa
Pressure indication
_
P
CYV
3.1-63
Series ZX
(Consult SMC for detailed specifications, size and delivery.)
Made to Order Specifications
Ordeer
Mad
Valve Unit/Other combinations of supply valve and release valve (Ejector unit)
Ejector Unit
If other than standard combination of supply valve and release valve (Refer to p.3.1-5.) are required, select
from the following combinations. (Refer to p.3.1-4 for "How to Order".)
Combination symbol:
K2
Combination symbol:
Application: The supply pressure is
controlled by external air signals and a
vacuum release is effected by the solenoid
valve. Because the supply valve is N.O.,
the pressure that is supplied to the ejector
is not interrupted during a power outage;
as a result, the state of suction can be
maintained. This combination is used for
preventing the workpieces from dropping
during power outages.
controlled by electirc signals and a
vacuum release is effected by
introducing external air.
Combination symbol:
Combination symbol:
How to operate
How to operate
Valve Supply valve Release valve
Solenoid valve External 2 port valve
Condition
1. Work adsorption
ON
OFF
2. Vacuum release
OFF
ON
3. Operation stop
OFF
OFF
Air operated valve Solenoid valve
Condition
1. Work adsorption
OFF
OFF
2. Vacuum release
ON
ON
3. Operation stop
ON
OFF
K4
Combination symbol:
J1
An N.O. solenoid valve is used as the
supply vlave. An air operated N.C. valve
is used for the vacuum release valve.
valve is not used.
restricted by electric signals and a
vacuum release is effected by air
signals. Becuase the supply valve is
N.O., the pressure that is supplied to
the ejector is not interrupted during a
power outage; as a result, the state of
suction can be maintained. This
outages.
Application: This combination is
used for effecting control in
accordance with electric signals. A
intrusion of air between the
silencer, pad, and the workpiece.
This combination is used when
there is no need to accelerate the
How to operate
How to operate
Solenoid valve Air operated valve
Condition
1. Work adsorption
OFF
OFF
2. Vacuum release
ON
ON
3. Operation stop
ON
OFF
_____
Solenoid valve
Condition
_____
1. Work adsorption
ON
_____
2. Vacuum release
OFF
_____
3. Operation stop
OFF
K5
provided to serve as the supply
valve. Also, an N.C. solenoid valve
is used for the vacuum release
valve.
Application: The supply pressure
is controlled by external air signals
and a vacuum release is effected
by the solenoid valve.
3.1-64
K7
An air operated N.O. valve is used as the
supply valve. An N.C. solenoid valve is
used for the vacuum release valve.
the supply valve. Also, an external 2
port valve (vacuum valve) must be
provided to serve as the vacuum
release valve.
Combination symbol:
J2
An N.O. solenoid valve is used as the supply
valve. A vacuum release valve is not used.
Application: It is used for controlling the
supply pressure through electric signals.
Because the supply valve is N.O., the
pressure that is supplied to the ejector is not
interrupted during a power outage; as a
result, the state of suction can be
maintained. This is used for preventing the
outages. A vacuum release is effected by the
intrusion of air between the silencer, pad,
and the workpiece. This combination is used
when there is no need to accelerate the
How to operate
How to operate
External 3 port valve Solenoid valve
Condition
1. Work adsorption
ON
OFF
2. Vacuum release
OFF
ON
3. Operation stop
OFF
OFF
_____
Solenoid valve
Condition
_____
1. Work adsorption
OFF
_____
2. Vacuum release
ON
_____
3. Operation stop
ON
Series ZX
Combination symbol: J3
An N.C. solenoid valve is used as
valve is not used.
is controlled by external air signals.
A vacuum release is effected by the
intrusion of air between the
silencer, pad, and the workpiece.
This is used when there is no need
to accelerate the vacuum release
speed.
Combination symbol: D2
ZX
the vacuum release valve. An
external supply valve must be
provided.
is controlled by the external valve
How to operate
_____
Condition
_____
1. Work adsorption
ON
_____
2. Vacuum release OFF
_____
3. Operation stop
OFF
External valve Solenoid valve
Condition
1. Work adsorption
ON
OFF
2. Vacuum release
OFF
ON
3. Operation stop
OFF
OFF
An air operated N.O. valve is used as the supply
Application: The supply pressure is controlled
by external air signals. Because the supply valve
is N.O., the pressure that is supplied to the
ejector is not interrupted during a power outage;
as a result, the state of suction can be
maintained. This is used for preventing the
workpieces from dropping during power outages.
A vacuum release is effected by the intrusion of
air between the silencer, pad, and the workpiece.
This type is used when there is no need to
accelerate the vacuum release speed.
ZM
ZY
ZH
ZL
ZF
ZP
ZCU
An external valve must be provided
to serve as the supply valve. Also,
an external 2 port valve (vacuum
valve) must be provided to serve as Vacuum
related
the vacuum release valve.
CYV
and a vacuum release is effected by
the external 2 port valve (vacuum
valve).
How to operate
How to operate
_____
Air operated valve
Condition
_____
1. Work adsorption
OFF
_____
2. Vacuum release
ON
_____
3. Operation stop
OFF
Condition
1. Work adsorption
ON
OFF
2. Vacuum release
ON
OFF
3. Operation stop
OFF
OFF
D1
ZR
ZU
How to operate
Combination symbol:
Ordeer
Mad
the vacuum release valve. An
external supply valve must be
provided.
An external valve must be provided
to serve as the supply valve. An air
operated N.C. valve is used for the
vacuum release valve.
by external air signals.
How to operate
How to operate
Condition
1. Work adsorption
ON
OFF
2. Vacuum release
ON
OFF
3. Operation stop
OFF
OFF
External valve Air operated valve
Condition
1. Work adsorption
ON
OFF
2. Vacuum release
OFF
ON
3. Operation stop
OFF
OFF
3.1-65
Series ZX
Ordeer
Mad
Valve Unit/Other combinations of supply valve and release valve (External vacuum supply system)
If other than standard combination of supply valve (Refer to p.3.1-39.) and release valve are required, select from the following combinations.
(Refer to p.3.1-38 for "How to Order".)
An N.C. solenoid valve is used as the
supply valve. Also, an external 2 port
valve (vacuum valve) must be
provided to serve as the vacuum
release valve.
controlled by electric signals and a
vacuum release is effected by external
air.
An air operated N.O. valve is used as the
supply valve. An N.C. solenoid valve is
vacuum release is effected by the solenoid
valve. Because the supply valve is the
N.O., the pressure that is supplied to the
ejector is not interrupted during a power
outage; as a result, the state of suction can
be maintained. This combination is used
for preventing the workpieces from
dropping during power outages.
How to operate
How to operate
Solenoid valve Exterminal 2 port valve
Condition
OFF
1. Work adsorption
ON
2. Vacuum release
ON
OFF
3. Operation stop
OFF
OFF
Air operated valve Solenoid valve
Condition
1. Work adsorption
OFF
OFF
2. Vacuum release
ON
ON
3. Operation stop
OFF
ON
supply valve. An air operated N.C. valve is
supply valve. A vacuum release valve is
not used.
controlled by electric signals and a vacuum
release is effected by air signals. Because
the supply valve is N.O., the pressure that
is supplied to the ejector is not interrupted
outages.
Application: This combination is used for
controlling the pressure by electric signals.
Normally, the workpiece is released due to
the air leakage that occurs between the
pad and the workpiece. However, if there
is no air leakage, the workpiece will not
become detached because the vacuum
state is maintained even when the supply
valve is turned OFF. To effect releasing,
an external 2 port valve (vacuum valve)
must be provided.
How to operate
How to operate
Condition
OFF
1. Work adsorption
OFF
2. Vacuum release
ON
ON
3. Operation stop
ON
ON
_____
Solenoid valve
Condition
_____
1. Work adsorption
ON
_____
2. Vacuum release
OFF
_____
3. Operation stop
OFF
provided to serve as the supply valve.
Also, an N.C. solenoid valve is used
for the vacuum release valve.
solenoid valve.
3.1-66
supply valve. A vacuum release valve
is not used.
Application: Used for controlling with
N.O., the pressure is not interrupted
during a power outage. This prevents
the workpieces from dropping.
Normally, the workpiece is released
due to leakage. However, if no air
leakage, the workpiece will not detach
because the vacuum state is
maintained even when the supply
valve is turned ON. To release, an
external 2 port valve (vacuum valve)
must be used.
How to operate
How to operate
Condition
OFF
1. Work adsorption
ON
2. Vacuum release
OFF
ON
3. Operation stop
OFF
OFF
_____
Solenoid valve
Condition
_____
1. Work adsorption
OFF
_____
2. Vacuum release
ON
_____
3. Operation stop
ON
Series ZX
An N.C. solenoid valve is used as the supply
controlled by external air signals. Normally,
the workpiece is released due to the air
leakage that occurs between the pad and the
workpiece. However, if there is no air leakage,
the workpiece will not become detached
because the vacuum state is maintained even
when the supply valve is turned OFF. To
effect releasing, an external 2 port valve
(vaccum valve) must be provided.
Combination symbol:
Ordeer
Mad
ZX
vacuum release valve. A supply valve
is not used.
controlled by external 2 port valve
(vacuum valve) and a vaccum release
is effected by the solenoid.
How to operate
Condition
1. Work adsorption
ON
OFF
2. Vacuum release
OFF
ON
3. Operation stop
OFF
OFF
Application: Supply is controlled by
external air signals. Because the valve
is N.O., the pressure is not interrupted
during a power outage. This prevents
the workpieces from dropping.
Normally, the workpiece is released
due to leakage. However, if no
leakage, the workpiece will not detach
because the vacuum state is
maintained even when the valve is
turned ON. To release, an external 2
port valve (vaccum valve) must be
provided.
Combination symbol:D3
controlled by the external 2 port valve
(vaccum valve) and releasing is also
effected by the extermal 2 port valve.
How to operate
_____
Air operated valve
Condition
_____
1. Work adsorption
OFF
_____
2. Vacuum release
ON
_____
3. Operation stop
ON
Condition
1. Work adsorption
ON
OFF
2. Vacuum release
ON
OFF
3. Operation stop
OFF
OFF
vaccum release valve. A supply valve
is not used.
controlled by an external 2 port valve
(vaccum valve) and a vacuum release
is effected by the solenoid.
ZL
ZF
ZP
ZCU
An external 2 port valve (vaccum
valve) must be provided to serve as
the supply valve and the vaccum
release valve.
How to operate
ZY
ZU
_____
Condition
_____
1. Work adsorption
ON
_____
2. Vacuum release
OFF
_____
3. Operation stop
OFF
An air operated N.O. valve is used as
the supply valve. A vaccum release
valve is not used.
ZM
ZH
How to operate
J4
ZR
An external 2 port valve (vaccum
valve) must be provided to serve as
the supply valve. An air operated
N.C. valve is used for the vaccum
release valve.
is controlled by the external 2 port
valve (vaccum valve) and vaccum
release is effected by external air
signals.
How to operate
How to operate
Condition
OFF
1. Work adsorption
ON
2. Vacuum release
OFF
ON
3. Operation stop
OFF
OFF
Condition
1. Work adsorption
ON
OFF
2. Vacuum release
OFF
ON
3. Operation stop
OFF
OFF
3.1-67
CYV
Vacuum
related
Series ZX
Ordeer
Mad
Noise reduction silencer assembly/the ejector exhaust style is applicable to the silencer equipped specifications
ZX1 Nozzle dia. Exhaust style
Valve
Voltage
Electrical entry
–X121
•
Noise reduction silencer assembly
Reduction in the exhaust noise from the ejector (silencing effect 8dB (A) Standard silencer assembly comparison)
3.1-68

Vacuum Module: Series ZX

Transcripción

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