docPERSONAL INFORMATION Full name: Isabel Ayerdi Olaizola Date
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PERSONAL INFORMATION Full name: Isabel Ayerdi Olaizola Date
PERSONAL INFORMATION Full name: Isabel Ayerdi Olaizola Date of birth: 10 September 1968 Nationality: Spanish ACADEMIC INFORMATION June 1992 Degree in Industrial Engineering, majoring in Electricity and Electronics. TECNUN, Engineering School, San Sebastian, Gipuzkoa December 1998 Professional Doctorate in Industrial Engineering (PhD) TECNUN, Engineering School, San Sebastian, Gipuzkoa CURRENT POSITION Researcher in the Microelectronics and Microsystems Department at CEIT. Paseo Mikeletegi, 48 20009 San Sebastián, Gipuzkoa phone: 943 21 28 00 Ext. 2905 website: www.ceit.es e-mail: [email protected] Adjunct Professor (Profesora Asociada) in the Electrical, Electronic and Control Engineering Department at TECNUN, Engineering School. Technological Campus of the University of Navarra Paseo Manuel Lardizábal, 13 20018 San Sebastián, Gipuzkoa phone: 943 21 28 00 Ext. 2905 website: www.tecnun.es e-mail: [email protected] RESEARCH EXPERIENCE Chemical and physical microsensors – MEMS technology Microfluidics – Polymer Microfabrication PROJECTS Pressure sensor developed by silicon technologies for industrial applications Sensor de presión diferencial por tecnología de silicio para aplicaciones industriales Funded by: Programa GAME I (Acción especial del programa ESPRIT) Partners: COPRECI S. Coop. Duration: 1992-1994 Role: researcher Pressure transmitter based on a ceramic microsensor on silicon Transmisor de presión basado en microsensor cerámico sobre silicio Funded by: Programa GAME II (Acción Especial Programa ESPRIT) Partner: COPRECI S. Coop. Duration: 1993- 1995 Role: researcher Radiation thermoelectric sensor for safety systems in gas burners Sensor termoeléctrico de radiación para sistemas de seguridad en quemadores de gas Funded by: Programa GAME II (Acción Especial Programa ESPRIT) Partner: ORKLI S. Coop. (Grupo MCC) Duration: 1994- 1996 Role: researcher Ceramic microsensor based on tin oxide for methane detection in home and industrial environments Microsensor cerámico basado en óxido de estaño para la detección de gas metano en sistemas de seguridad domóticos e industriales Funded by: Basque Government Partners: GAS EUSKADI S.A. (Grupo EVE), ORKLI S. Coop. (Grupo MCC) Duration: 1997- 1999 Role: researcher Pre-industrialization of low-pressure silicon microsensors for electrical appliances Preindustrialización de microsensores de silicio de baja presión para su aplicación a electrodomésticos Funded by: Basque Government Partners: COPRECI S. Coop., FAGOR ELECTRÓNICA S. Coop. (Grupo MCC), FAGOR ELECTRODOMÉSTICOS S. Coop. Duration: 1997-1999 Role: researcher Development of a microsensor for measuring the humidity in the automotive brake fluid Desarrollo de un detector de humedad en el líquido de frenos del automóvil Funded by: Spanish Government - Iniciativa ATYCA Partners: KRAFFT, S.A., ZERTAN, S.A. Duration: 1999 Role: research coordinator A microsystem for fluids analysis. Microsensors Microsistema para el análisis de fluidos. Microsensórica Funded by: Basque Government Duration: 2000 Role: Researcher A microsystem for fluids analysis. Microfluidics Microsistema para el análisis de fluidos. Microfluidica Funded by: Basque Government Duration: 2000 Role: Researcher Microfluidic systems: automotive oil analysis Microsistemas fluídicos: análisis de aceite en el automóvil Funded by: Spanish Government - Programa PROFIT Duration: 2000-2002 Role: researcher Development of thin silicon membranes for ultrasonic microsensors Desarrollo de membranas delgadas de silicio para su aplicación a la obtención de microdetectores de ultrasonidos Funded by: Basque Government Duration: 2000-2002 Role: researcher Microfluidics Microsistemas fluídicos Funded by: Basque Government Duration: 2001-2002 Role: researcher Development of micromachining and packaging techniques Desarrollo de Técnicas de Micromecanizado y Encapsulado Funded by: Basque Government Duration: 2001-2002 Role: researcher Basic techniques in integrated optics Técnicas básicas de óptica integrada Funded by: Basque Government Duration: 2001-2002 Role: researcher Thermal conductivity microsensor for measuring the natural gas quality Microsensor de conductividad térmica para la medida de calidad del gas natural Funded by: Basque Government - INTEK Partners: Gas de Euskadi S.A., Wartsila Ibérica S.A., Kosorkuntza A.I.E. Duration: 2001-2003 Role: research coordinator Portable and autonomous microlab Microlaboratorio portable y autónomo (NIMITEK) Funded by: Basque Government - ETORTEK Partners: tekniker, Ikerlan Duration: 2002-2004 Role: researcher Low-cost flow and temperature sensors for water heaters Caudalímetro de bajo costo con medida de temperatura para calentadores de agua Funded by: Basque Government - INTEK Partners: ORKLI S. Coop., Fagor Electrodomésticos S. Coop. Duration: 2002-2005 Role: researcher New thermal conductivity microsensor for the assessment of gas generated in dumps Nuevo microsensor de conductividad térmica basado en Silicio micromecanizado para la valoración del gas generado en vertederos Funded by: Basque Government - Fondo para la Cooperación Aquitania-Euskadi Partners: Université de Bordeaux I /CNRS Duration: 2003- 2004 Role: research coordinator Microsystems for analyzing the degradation of engine and transformer oils Microsistema para la evaluación de la degradación de aceites en motores y transformadores Funded by: Basque Government - INTEK Partners: Wärtsilä Ibérica, S.A., Kosorkuntza A.I.E., OASA transformadores XXI Duration: 2003-2006 Role: research coordinator Catalytic microsensor for measuring the High Calorific Value, HCV, of natural gas Microsensor catalítico para la determinación del poder calorífico superior del gas natural Funded by: Spanish Government - PROFIT Partners: Naturcorp Redes S.a.u., Wärtsilä Ibérica, S.A., Kosorkuntza A.I.E., Orkli S. Coop. Duration: 2004-2005 Role: research coordinator Cooperative Research Center in Micro- and Nanotechnology Centro de Investigación Cooperativo en Micro-Nanotecnologías (MICROGUNE) Funded by: Basque Government - ETORTEK Partners: Ikerlan, Tekniker, CMIC, Tecnun, MU Duration: 2004-2006 Role: researcher Optimization of a microsystem to measure the Methane Number of Natural gas Optimización del microsistema de medida del número de metano en el gas natural Funded by: Naturcorp Multiservicios S.A., Wartsila Ibérica S.A., Kosorkuntza A.I.E. Duration: 2006 Role: research coordinator Development of lithography technology for nanoscale structuring of materials using laser beam interference Development of lithography technology for nanoscale structuring of materials using laser beam interference Funded by: European Commission (VI FP) Partners: Cardiff University, Tampere University of Technology, Russian Academy of Sciences, Silios Technologies S.A. Duration: 2006-2008 Role: researcher Development of a telemetric gas meter for natural gas Desarrollo de un contador de termias con telemetría para gas natural Funded by: Basque Government - INTEK BERRI Partners: ZIV Medidas, Naturcorp Redes S.A.U Duration: 2006-2008 Role: research coordinator Microsystems applied to healthcare Microsistemas aplicados a la salud (MICAS) Funded by: Basque Government - ETORTEK Partners: Ikerlan, Tekniker, CMIC, Tecnun, MU Duration: 2007-2009 Role: researcher Wireless pressure sensor for biomedical applications Sensor de presión inalámbrico para aplicaciones biomédicas Funded by: Basque Government - INTEK BERRI Partners: Oiarso S. Coop., Incide S.A., Iquimesa Servicios Sanitarios S.L.U. Facultad de Medicina (EHU/UPV) Duration: 2007-2009 Role: research coordinator Bioengineering for the Society Bioingeniería al Servicio de la Sociedad Funded by: Spanish Government - Proyectos Estratégicos Singulares PROFIT Duration: 2008- 2011 Role: researcher Development of biosensors based on molecular and immunochemical techniques for the detection of pathogens Desarrollo de biosensores para la detección de patógenos basados en técnicas moleculares e inmunoquímicas Funded by: Spanish Government - Proyectos Estratégicos Singulares PROFIT Duration: 2008- 2011 Role: researcher In vitro microtechnology for high-speed diagnosis Microtecnología in vitro para diagnóstico rápido (mivDIRA) Funded by: Basque Government - ETORTEK Duration: 2009-2011 Role: researcher Cochlear atraumatic surgery and flat electrode arrays Cochlear atraumatic surgery and flat electrode arrays Funded by: CEBIO Duration: 2009- 2012 Role: researcher SCIENTIFIC PUBLICATIONS Ceramic pressure sensor based on tantalum thin film I.Ayerdi, E. Castaño, A. García-Alonso y F.J. Gracia Sensors & Actuators A, 42-45, pp. 435-438 (1994) Characterization of tantalum oxynitride thin films as high-temperature strain gauges I.Ayerdi, E. Castaño, A. García-Alonso y F.J. Gracia Sensors and Actuators A, 46-47, pp. 218-221 (1995) High-temperature ceramic pressure sensors I.Ayerdi, E. Castaño, A. García-Alonso y F.J. Gracia Sensors and Actuators A, 60, 72-75 (1997) Thermal conductivity microsensor for determining the methane number of natural gas D. Puente, F.J. Gracia, I. Ayerdi Sensors and Actuators B, 110, 181-189 (2005) Thermal behavior of freestanding microstructures fabricated by silicon frontside processing using porous silicon as sacrificial layer D. Puente, S. Arana, F.J. Gracia, I. Ayerdi IEEE Sensors Journal, 6 548-556 (2006) SU8 protective layers in liquid operating SAWs N. Arana, D. Puente, I. Ayerdi, E. Castaño y J. Berganzo Sensors and Actuators B, 118, 374-379 (2006) BaTiO3–CuO sputtered thin film for carbon dioxide detection G. García Mandayo, F. González, I. Rivas, I. Ayerdi y J. Herrán Sensors and Actuators B, 118, 305-310 (2006) Influence of silver as an additive on BaTiO3–CuO thin film for CO2 monitoring J. Herrán, G. Gª Mandayo, I. Ayerdi, E. Castaño Sensors and Actuators B, 129, 386-390 (2008) High-power laser interference lithography process on photoresist: Effect of laser fluence and polarisation M. Ellman, A. Rodríguez, N. Pérez , M. Echeverria, Y.K. Verevkin, C.S. Peng , T. Berthou, Z. Wang, S.M. Olaizola, I. Ayerdi Applied Surface Science, 255, 5537-5541 (2009) CONFERENCE CONTRIBUTIONS A comparative study of sputtered piezoresistive materials for mechanical sensors E. Castaño, A. García-Alonso, I. Obieta, I. Ayerdi, F.J. Gracia First International Conference on Materials for Microelectronics, Barcelona 1994 High temperature ceramic pressure sensor I. Ayerdi, E. Castaño, A. García-Alonso, F.J. Gracia Eurosensors X - Leuven, Bélgica (1996) Análisis de las propiedades piezorresistivas de los oxinitruros de tántalo I. Ayerdi, E. Castaño, A. García-Alonso, F.J. Gracia V Reunión Nacional de Materiales – Cádiz 1996 Microsensor superficial de nitruro de tántalo sobre silicio micromecanizado para la medida de presión G. Theodorou, S. Alvarez, I. Ayerdi, E. Castaño, F.J. Gracia Conferencia de dispositivos microelectrónicos, CDE’97, Barcelona 1997 Transmisor de presión basado en microsensor cerámico sobre silicio G. Theodorou, S. Alvarez, I. Ayerdi, E. Castaño, F.J. Gracia Jornada de Clausura de la Acción Especial GAME, Madrid 1997 Pyrex Glass Anodic Bonding for the packaging of low pressure piezoresistive sensors J.M. Artola, I. Ayerdi, G. Bistué, E. Castaño, F.J. Gracia 2ª Conferencia de Dispositivos Electrónicos CDE’99 – Madrid 1999 Influence of the palladium adding method on methane selectivity in SnO2 thin-film sensors S.M. Olaizola, G. García, I. Ayerdi, E. Castaño, F.J. Gracia, J.A. Díez de Ulzurrun, A.M. Gutiérrez IGU 21st World Gas Conference – Nice 2000 Impedance measurements for the development of moisture sensors in brake fluids D. Puente, I. Ayerdi, E. Castaño, F.J. Gracia Conferencia de dispositivos microelectrónicos, CDE’01 – Granada 2001 N-type silicon as masking material in porous silicon formation process D. Puente, I. Rivas, S. Arana, I. Ayerdi y F.J. Gracia Conferencia de Dispositivos Electrónicos, CDE’03 – Barcelona 2003 Humidity sensor based on a commercial polyimide sensitive layer I. Rivas, D. Puente, I. Ayerdi y F.J. Gracia Conferencia de Dispositivos Electrónicos, CDE’03 – Barcelona 2003 Development of a novel and low cost thermal conductivity microsensor to measure the methane number of natural gas D. Puente, J. Gracia, I. Ayerdi et al. International Gas Research Conference (IGRC 2004) – Vancouver 2004 Thermal Conductivity Microsensor to measure the Methane Number of Natural Gas D. Puente, J. Gracia and I. Ayerdi Conferencia de Dispositivos Electrónicos, CDE’05 – tarragona 2005 Ag/AgI quasi-reference electrodes I. Rivas, D. Puente, I. Ayerdi y E. Castaño Conferencia de Dispositivos Electrónicos, CDE’05 – Tarragona 2005 SU8 protective layers in liquid operating SAWs N. Arana, D. Puente, I. Ayerdi, E. Castaño Eurosensors XIX – Barcelona 2005 Effect of electrode geometry in amperometric glucose sensors based on poly(o-phenylenediamine) membranes N. Arana, D. Puente, I. Ayerdi, E. Castaño Eurosensors XIX – Barcelona 2005 BaTiO3-CuO sputtered thin film for carbon dioxide detection G. García Mandayo, F. González, I. Rivas, I. Ayerdi, J. Herrán Eurosensors XIX – Barcelona 2005 New thermal conductivity microsensor to measure the methane number of natural gas A. Gutiérrez, D. Puente, D. Toro, E. Pérez, I. Ayerdi, J. Gracia, J. Sabin 23rd World Gas Conference – Ámsterdam 2006 SAW devices with SU8 protective layers and Ti/Pt shielding for measuring liquids viscosity N. Arana, D. Puente e I. Ayerdi Eurosensors XX – Goteborg 2006 Carbon dioxide gas sensors based on BaTiO3-CuO thin films technology J.Herrán*, G.Gª Mandayo, I. Ayerdi, E. Castaño Eurosensors XX – Goteborg 2006 Principios y aplicaciones de la fotolitografía por interferencia láser de múltiple haz A. Rodríguez, N. Pérez, I. Ayerdi, Y. Verevkin, V.N. Petryakov, E. Ya. Daume, T. Berthou, C. Peng, Z. Wang, S.M. Olaizola III Taller Nacional de Procesado de Materiales con Láser – Valencia 2006 High resolution CMOS integrated sensor for human body temperature measurement A. Ubarretxena, I. Mayordomo, D. pardo, A. Vaz, I. Ayerdi, R. Berenguer XXII Conference on Design of Circuits and Integrated Systems (DCIS) - 2007 Processing of BaTiO3-CuO films for gas sensing applications using pulsed Laser Interference Lithography A. Rodríguez, J. Herrán, N. Pérez, I. Ayerdi, G. Gª. Mandayo, S.M. Olaizola, Y. Verevkin, V.N. Petryakov, A.Y. Klimov, B.A. Gribkov, C.S. Peng, Z. Wang Congreso: 9th International Conference on Laser Ablation – Tenerife 2007 System Requirement Analysis of Laser Interference Nanolithography Autores: Zuobin Wang, Jin Zhang, Changsi Peng, Chunlei Tan, Isabel Ayerdi, Ainara Rodríguez, Yury K. Verevkin, Thierry Berthou and Stéphane Tisserand IEEE International Conference on Mechatronics and Automation - 2007 Aplicación de la fotolitografía por interferencia láser de múltiple haz a la fabricación de estructuras nanométricas A Rodríguez, N Pérez, I Ayerdi, S M Olaizola, Y Verevkin, V N Petryakov, E Ya Daume, T Berthou, CS Peng and Z Wang 5º Reunión Española de Optoelectrónica OPTOEL ’07 - 2007 Novel Microsystem with a SU8 protective layer for engine oil monitoring Autores: N. Arana, N. Pérez, F. Arizti, I. Ayerdi Eurosensors XXII – Dresden 2008 PATENTS Method for the determination of the Methane Number of combustible gases Método para la determinación del número de metano en gases combustibles Number: P200400652 Applicants: Naturcorp Multiservicios S.A., Kosorkuntza A.I.E. y Wärtsilä NSD Ibérica S.A. Inventors: Castaño Carmona, Enrique; Gracia Gaudó, Javier; Ayerdi Olaizola, Isabel; Puente Pousada, David; Olaizola Izquierdo, Santiago y García Elizalde, Jorge Laser Interference Lithographic System Sistema de litografía por interferencia láser Number: P200701546 Applicants: Institute Of Applied Physics, Centro de Estudios e Investigaciones Técnicas de Gipuzkoa, Optoelectronics Research Centre (Tampere University of Technology) Inventors: Konstantinovich, Yuri; Nikolaevich Petrykov, Vladimir; Olaizola, Santiago; rodríguez, Ainara; Ayerdi, Isabel; Peng, Changsi; Tan, Chunlei; Pessa, Markus Capacitance-frequency converter for capacitive transducers Circuito conversor de capacidad-frecuencia para transductores capacitivos Number: P200701489 Applicants: Farsens s.l. Inventors: Berenguer, Roc; Sevillano, Juan Francisco; García-Alonso, Andrés; Ayerdi, Isabel; Vélez, Igone; Gutiérrez, Iñigo et al. Low consumption ring oscillator protected against supply voltage variations Circuito oscilador en anillo de bajo consumo con protección frente a variaciones de tensión de alimentación Number: P200801086 Applicant: Farsens s.l. Inventors: Ubarretxena, Aritz; Berenguer, Roc; Pardo, Daniel: Ayerdi, Isabel; Solar, Héctor; Bistué, Guillermo Capacitance-frequency converter with the variable capacitor as oscillator power supply Convertidor capacidad-frecuencia con la capacidad variable como fuente de alimentación del oscilador Number: P200801085 Applicant: Farsens s.l. Inventors: Berenguer, Roc; Alexander Vaz; Ubarretxena, Aritz; Ayerdi, Isabel, Sevillano, Juan Francisco; García-Alonso, Andrés. Multiple prototyping process for capacitive mechanical microsensors Proceso de prototipado múltiple para microsensores mecánicos de tipo capacitivo Number: P200801029 Applicant: Farsens s.l. Inventors: Ayerdi, Isabel; García-Alonso, Andrés; Vélez, Igone; Fernández, Iñaki; Cortés, Ainhoa; Valderas, Daniel TEACHING EXPERIENCE TECNUN, Engineering School, San Sebastian, Gipuzkoa Teaching Assistant in Linear Electronics, Engineering Degree (1993-1998) Adjunct Professor in Microsystems Technology, Doctoral Program in Applied Engineering, since 2005 Micro- and Nanotechnology, Master in Biomedical Engineering, since 2008 OTHER MERITS § § § § § § § § Predoctoral grant from Basque Government, from 1994 to 1997. FSRM Course Microdevices for Fluid Handling - Neuchâtel, September 2001 Course Semiconductor lasers: their physics and applications (20 hours), given by Carmen S. Menoni, from the Department of Electrical & Computer Engineering, Colorado State University, CEIT, July 2004. Course Cofabrication of MEMS and electronics - IMEC (Leuven, Bélgica), December 2008 Member of the jury in the doctoral thesis titled New catalysis and filtering strategies to improve the performance of carbon monoxide sensors based on tin oxide nanoparticles presented by Gemma García Mandayo in TECNUN, Engineering School, University of Navarra, October 2002. Member of the jury in the doctoral thesis titled Thin films of high magnetoresistance nanogranular alloys for the development of contact-less position sensors presented by Sergio Arana Alonso in TECNUN, Engineering School, University of Navarra, February 2003. Director of the thesis entitled A Laser Interference Lithographic Tool for Micro- and Nano-scale Patterning of Materials presented by Ainara Rodríguez González in TECNUN, Engineering School, University of Navarra, February 2010 Member of the Selection Commission in the Electronic and Communications, Optoelectronic and Photonic Devices, Sensors and Microsystems Area within the National Program of Basic Research Projects (MEC), Call 2008.
